Dresden
Germany
5
2014-05-22
The entities that hold a legal rights for patent applications filed by inventor KUBIS Michael:
Michael KUBIS from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and scatterometers, lithographic systems, and lithographic processing cells
#2 | 2012-01-19Method and apparatus for determining an overlay error
#3 | 2011-02-03Methods and scatterometers, lithographic systems, and lithographic processing cells
#4 | 2010-02-18Compensation of Process-Induced Displacement
#5 | 2005-03-03Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
768991 ⎘