Junichi Arami

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2015-01-22

Top Assignees for applications by Junichi Arami

The entities that hold a legal rights for patent applications filed by inventor Arami Junichi:

Junichi Arami from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma etching apparatus

Wafer processing method

THIN FILM FORMATION BY ATOMIC LAYER GROWTH AND CHEMICAL VAPOR DEPOSITION

Heat treatment apparatus

Gas switching mechanism for plasma processing apparatus

Thin-film deposition apparatus

InventorID:

770999 ⎘