Sandy Hook, Connecticut
United States
33
2019-09-26
The entities that hold a legal rights for patent applications filed by inventor VOGEL Herman:
Herman VOGEL from Sandy Hook, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2018-07-05Lithographic apparatus and device manufacturing method
#3 | 2017-12-14Lithographic apparatus and device manufacturing method
#4 | 2017-10-12IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZZLES
#5 | 2017-02-16Lithographic apparatus and device manufacturing method
#6 | 2017-02-02Lithographic apparatus and device manufacturing method
#7 | 2015-11-12Lithographic apparatus and device manufacturing method
#8 | 2014-11-13Immersion photolithography system and method using microchannel nozzles
#9 | 2014-10-09Lithographic apparatus and device manufacturing method
#10 | 2014-08-21Immersion photolithography system and method using microchannel nozzles
#11 | 2012-10-04Lithographic apparatus and device manufacturing method
#12 | 2012-06-07Immersion photolithography system and method using microchannel nozzles
#13 | 2011-12-22Lithographic apparatus and device manufacturing method
#14 | 2011-11-10Immersion photolithography system and method using microchannel nozzles
#15 | 2011-11-10Immersion photolithography system and method using microchannel nozzles
#16 | 2011-11-10Lithographic apparatus and device manufacturing method
#17 | 2011-08-04Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
#18 | 2010-06-17Lithographic apparatus and device manufacturing method
#19 | 2009-12-10Lithographic apparatus and device manufacturing method
#20 | 2009-03-19Laminar Flow Gas Curtains for Lithographic Applications
#21 | 2009-01-01Increasing gas gauge pressure sensitivity using nozzle-face surface roughness
#22 | 2008-07-31Immersion photolithography system and method using microchannel nozzles
#23 | 2008-02-14Method and systems for compact, micro-channel, laminar heat exchanging
#24 | 2007-09-27Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
#25 | 2007-01-04Laminar flow gas curtains for lithographic applications
#26 | 2006-06-15Immersion lithography proximity sensor having a nozzle shroud with flow curtain
#27 | 2006-04-27Lithographic apparatus and device manufacturing method
#28 | 2006-03-28Proximity sensor nozzle shroud with flow curtain
#29 | 2006-02-23Lithographic apparatus and device manufacturing method
#30 | 2006-02-02Methods and systems for compact, micro-channel laminar heat exchanging
#31 | 2005-08-04Immersion photolithography system and method using microchannel nozzles
#32 | 2005-04-07Method and system for active purging of pellicle volumes
#33 | 2005-03-15Immersion photolithography system and method using microchannel nozzles
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