Campbell, California
United States
6
2014-09-04
The entities that hold a legal rights for patent applications filed by inventor SOCHA Robert:
Robert SOCHA from Campbell, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders
#2 | 2011-03-31Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders
#3 | 2011-03-03Optimized polarization illumination
#4 | 2009-02-26Source and mask optimization by changing intensity and shape of the illumination source
#5 | 2008-02-21Optimized polarization illumination
#6 | 2005-06-23Optimized polarization illumination
895131 ⎘