Espoo
Finland
100
2026-01-22
The entities that hold a legal rights for patent applications filed by inventor Ritala Mikko:
Mikko Ritala from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND SYSTEM FOR DEPOSITING A METAL-CONTAINING LAYER
#2 | 2025-12-25METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
#3 | 2025-10-02SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS
#4 | 2025-08-21METHODS AND SYSTEMS FOR ETCHING
#5 | 2025-08-21METHODS AND SYSTEMS FOR DEPOSITING METALLOID LAYER
#6 | 2025-07-10METHOD AND APPARATUS FOR AREA-SELECTIVE DEPOSITION
#7 | 2025-06-12Method and system for depositing transition metal carbide
#8 | 2025-05-01METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE
#9 | 2025-04-17DEPOSITION OF TRANSITION METAL-COMPRISING MATERIAL
#10 | 2024-12-19VAPOR DEPOSITION PROCESSES
#11 | 2024-11-07Vapor Deposition Processes
#12 | 2024-08-22METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
#13 | 2024-08-22Method and system for depositing transition metal carbide
#14 | 2023-12-21SELECTIVE DEPOSITION OF MATERIAL COMPRISING NOBLE METAL
#15 | 2023-09-28Area selective organic material removal
#16 | 2023-08-24SYNTHESIS AND USE OF PRECURSORS FOR VAPOR DEPOSITION OF TUNGSTEN CONTAINING THIN FILMS
#17 | 2023-08-10ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGENIDE THIN FILMS
#18 | 2023-08-03VAPOR DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY
#19 | 2023-07-20SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS
#20 | 2023-06-08VAPOR DEPOSITION OF THIN FILMS COMPRISING GOLD
#21 | 2023-06-01Methods for filling a gap feature on a substrate surface and related semiconductor structures
#22 | 2023-03-23SYNTHESIS AND USE OF PRECURSORS FOR ALD OF GROUP VA ELEMENT CONTAINING THIN FILMS
#23 | 2023-03-02Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
#24 | 2023-03-02Vapor deposition processes
#25 | 2023-03-02Vapor deposition processes
#26 | 2022-12-29Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
#27 | 2022-12-08Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
#28 | 2022-11-17Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#29 | 2022-08-11Deposition of transition metal—comprising material
#30 | 2022-04-14METHODS FOR DEPOSITING A TRANSITION METAL CHALCOGENIDE FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
#31 | 2022-01-06Atomic layer deposition of rhenium containing thin films
#32 | 2021-12-30Area selective organic material removal
#33 | 2021-12-16Atomic layer deposition and etching of transition metal dichalcogenide thin films
#34 | 2021-11-11Synthesis and use of precursors for ALD of tellurium and selenium thin films
#35 | 2021-10-14Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
#36 | 2021-09-09Vapor deposition of thin films comprising gold
#37 | 2021-09-02Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
#38 | 2021-09-02Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
#39 | 2021-08-12Synthesis and use of precursors for vapor deposition of tungsten containing thin films
#40 | 2021-06-24Methods for filling a gap feature on a substrate surface and related semiconductor structures
#41 | 2021-06-03Synthesis and use of precursors for ALD of group VA element containing thin films
#42 | 2021-05-20Novel ion exchange materials
#43 | 2021-03-04METHODS AND APPARATUS FOR DEPOSITING A CHALCOGENIDE FILM AND STRUCTURES INCLUDING THE FILM
#44 | 2021-01-14Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#45 | 2021-01-07Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
#46 | 2020-10-29Atomic layer deposition of rhenium containing thin films
#47 | 2020-10-29Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
#48 | 2020-09-17Synthesis and use of precursors for ALD of group VA element containing thin films
#49 | 2020-07-23Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
#50 | 2020-05-21Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
#51 | 2020-03-12Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#52 | 2019-12-19Precursors and methods for atomic layer deposition of transition metal oxides
#53 | 2019-10-03Synthesis and use of precursors for vapor deposition of tungsten containing thin films
#54 | 2019-09-05Method for depositing a metal chalcogenide on a substrate by cyclical deposition
#55 | 2019-08-29Synthesis and use of precursors for ALD of tellurium and selenium thin films
#56 | 2019-08-15Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures
#57 | 2019-08-15Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
#58 | 2019-06-13Synthesis and use of precursors for ALD of group VA element containing thin films
#59 | 2019-04-11Method for depositing a metal chalcogenide on a substrate by cyclical deposition
#60 | 2019-03-07Vapor deposition of thin films comprising gold
#61 | 2018-08-16Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#62 | 2018-07-26Vapor deposition of thin films comprising gold
#63 | 2018-06-07Atomic layer deposition of rhenium containing thin films
#64 | 2018-05-10Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
#65 | 2018-04-12Synthesis and use of precursors for vapor deposition of tungsten containing thin films
#66 | 2018-03-29Synthesis and use of precursors for ALD of group VA element containing thin films
#67 | 2018-03-15Synthesis and use of precursors for ALD of tellurium and selenium thin films
#68 | 2017-09-07Precursors and methods for atomic layer deposition of transition metal oxides
#69 | 2016-12-22Vapor deposition of LiF thin films
#70 | 2016-11-17Method for producing SOFC cathode diffusion barrier layer and a SOFC
#71 | 2016-09-15Atomic layer deposition of metal phosphates and lithium silicates
#72 | 2016-09-08Precursors and methods for atomic layer deposition of transition metal oxides
#73 | 2016-08-04Synthesis and use of precursors for ALD of group VA element containing thin films
#74 | 2016-02-04Synthesis and use of precursors for ALD of tellurium and selenium thin films
#75 | 2015-08-13Atomic layer deposition of aluminum fluoride thin films
#76 | 2015-07-09Precursors and methods for atomic layer deposition of transition metal oxides
#77 | 2015-06-11Methods for forming conductive titanium oxide thin films
#78 | 2014-04-17Vapor deposition of LiF thin films
#79 | 2013-09-26Metamaterial thin films
#80 | 2013-01-10Microcontact printed films as an activation layer for selective atomic layer deposition
#81 | 2012-12-27Synthesis and use of precursors for ALD of group VA element containing thin films
#82 | 2012-11-01Atomic layer deposition of metal phosphates and lithium silicates
#83 | 2011-12-01PRECURSORS AND METHODS FOR ATOMIC LAYER DEPOSITION OF TRANSITION METAL OXIDES
#84 | 2011-08-18Organometallic Precursors and Related Intermediates for Deposition Processes, Their Production and Methods of Use
#85 | 2011-01-27Low Temperature ALD of Noble Metals
#86 | 2010-11-11Process for producing oxide films
#87 | 2010-01-14Synthesis and use of precursors for ALD of tellurium and selenium thin films
#88 | 2009-12-31Methods for forming thin films comprising tellurium
#89 | 2009-12-03Methods for forming conductive titanium oxide thin films
#90 | 2009-02-05Method of depositing rare earth oxide thin films
#91 | 2008-03-27Metal oxide films
#92 | 2007-06-28Process for producing oxide films
#93 | 2007-01-18Atomic layer deposition of noble metal oxides
#94 | 2006-10-05Oxide films containing titanium
#95 | 2006-09-19Method for growing oxide thin films containing barium and strontium
#96 | 2006-03-30Method for growing thin oxide films
#97 | 2005-08-23Method for growing thin oxide films
#98 | 2005-04-28Process for producing bismuth-containing oxide films
#99 | 2005-02-22Method of depositing rare earth oxide thin films
#100 | 2005-01-27Process for producing metal thin films by ALD
27486 ⎘