83818 ⎘
Specific applications of microelectromechanical systems; Switches characterised by the shape having a bridge fixed on two ends and connected to one or more dimples
MEMS SWITCH
#2Switch and electronic device including the same
#3MEMS SWITCH INCLUDING A CAP CONTACT
#4Actuator with buckling member stability
#5Capacitive micro structure
#6MEMS bridge devices and methods of manufacture thereof
#7Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#8MEMS RF-switch with controlled contact landing
#9Contact in RF-switch
#10DVC utilizing MIMS in the anchor
#11NEMS devices with series ferroelectric negative capacitor
#12Micro electromagnetically actuated latched switches
#13Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#14Internally generated DFT stepped hysteresis sweep for electrostatic MEMS
#15Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#16Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#17NEMS devices with series ferroelectric negative capacitor
#18MEMS electrostatic actuator device for RF varactor applications
#19Micro electromagnetically actuated latched switches
#20MEMS electrostatic actuator
#21Method of forming a micro-electro-mechanical system (MEMS) structure
#22Recovery system and methods for MEMS devices
#23MEMS device anchoring
#24MEMS device and method of manufacturing the same
#25Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#26Micro-electro-mechanical system (MEMS) capacitive ohmic switch and design structures
#27MEMS switch
#28MEMS electrostatic actuator
#29Electronic device
#30Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#31Micro-electro-mechanical system (MEMS) capacitive OHMIC switch and design structures
#32Method for integrating MEMS microswitches on GaN substrates comprising electronic power components
#33Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#34Methods of manufacturing a micro-electro-mechanical system (MEMS) structure
#35Method for reducing substrate charging
#36Electrostatic actuator having urging members with varying rigidities
#37Resonator and production method thereof
#38MEMS devices
#39MEMS devices and fabrication thereof
#40MEMs devices
#41Micro Electromechanical Device With Stress and Stress Gradient Compensation
#42MEMS element and method of manufacturing the same
#43Packaging Systems Incorporating Thin Film Liquid Crystal Polymer (LCP) and Methods of Manufacture
#44Micro movable device
#45MEMS device with controlled electrode off-state position
#46Electromechanical element and electronic equipment using the same
#47Micromechanical device and method of manufacturing micromechanical device
#48Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#49Micromechanical actuators comprising semiconductors on a group III nitride basis
#50Method of making contact posts for a microelectromechanical device
#51Micromechanical device comprising a mobile beam
#52MEMS structure and method of fabricating the same
#53MEMS switch and method of fabricating the same
#54Microsystem comprising a deformable bridge
#55Method of manufacturing a MEMS device and MEMS device
#56Microelectrical Device With Space Charge Effect
#57Micro-electro mechanical systems switch and method of fabricating the same
#58Shape memory device
#59Micro electromechanical device with stress and stress gradient compensation
#60Microelectromechanical system comprising a beam that undergoes flexural deformation
#61RF MEMS switch having asymmetrical spring rigidity
#62Low charging dielectric for capacitive MEMS devices and method of making same
#63Electrostatic microswitch for low-voltage-actuation component
#64Micromechanical device and method of manufacture thereof
#65Microelectromechanical system able to switch between two stable positions
#66Micro-switching element fabrication method and micro-switching element
#67Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#68Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#69Method of making a micromechanical device
#70Process for manufacturing a microsystem