84064 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning Surface micromachining
Sub-classes:APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE BY DIRECT LASER WRITING AND METHOD FOR USING THE SAME
#2ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING SAME
#3METHOD FOR FORMING MICRO CHANNELS IN MOLDED COMPONENTS AND AN ASSOCIATED MICRO-CHANNEL FORMING TOOL
#4Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#5Micro-nano incremental mechanical surface treatment method
#6Methods for forming a MEMS device layer on an active device layer and devices formed thereby
#7Method for inflating micro-channels
#8Atomic-scale e-beam sculptor
#9High-volume millimeter scale manufacturing
#10Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip
#11SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
#12Chip package and a method of producing the same
#13Semiconductor device
#14Method for manufacturing electronic component