84066 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Surface micromachining Sacrificial layer
Sub-classes:CAPACITIVE MICROELECTROMECHANICAL PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
#2METHOD FOR PRODUCING A MICROMECHANICAL LAYER STRUCTURE WITH HIGH ASPECT RATIO AND MICROMECHANICAL LAYER STRUCTURE
#3MEMS AND NEMS STRUCTURES
#4METHODS FOR POST-PROCESSING AND FOR HANDLING OF MEMS CHIPS
#5MULTIDIMENSIONAL CANTILEVERS AND STRESS-PROGRAMMABLE OUT-OF-PLANE INTERPOSERS FOR 3-D PHOTONIC INTEGRATION AND CONTROL
#6MEMS MICROPHONE AND METHOD FOR PREPARING MEMS MICROPHONE
#7MICROELECTROMECHANICAL SYSTEM DEVICE WITH FILLED VIA
#8DEVICE ENCAPSULATION USING PHYSICAL VAPOR DEPOSITION
#9MEMS SENSOR ARRANGEMENT AND METHOD FOR MANUFACTURING A MEMS SENSOR ARRANGEMENT
#10MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
#11Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators
#12MICROELECTROMECHANICAL SENSOR WITH IMPROVED EXTERNAL FLUIDIC COUPLING AND MANUFACTURING PROCESS THEREOF
#13SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM AND METHODS
#14MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTECTED AGAINST HUMIDITY AND MANUFACTURING PROCESS THEREOF
#15PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
#16MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
#17CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
#18MEMS AND NEMS STRUCTURES
#19MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
#20MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
#21MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
#22System And Method For Generating Fluid Flow
#23MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
#24Packaging of microelectromechanical system devices
#25CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
#26MEMS Switch, Preparation Method thereof, and Electronic Apparatus
#27MICROMECHANICAL DIAPHRAGM SYSTEM
#28MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#29MICRO-DEVICE STRUCTURES WITH ETCH HOLES
#30Curved cantilever design to reduce stress in MEMS actuator
#31FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRAY ION SOURCE
#32PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPONDING MANUFACTURING PROCESS
#33METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
#34METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE STRUCTURES IN AN ELECTROCHEMICAL FABRICATION SYSTEM
#35Micro-Electro-Mechanical System (Mems) Thermal Sensor
#36PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
#37MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
#38METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR
#39MEMS MICROPHONE WITH AN ANCHOR
#40Curved cantilever design to reduce stress in MEMS actuator
#41MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METHOD THEREOF
#42MEMS microphone and preparation method therefor
#43Semiconductor package device and method for manufacturing the same
#44CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A CAPACITIVE MICROELECTROMECHANICAL DEVICE
#45Anti-stiction enhancement of ruthenium contact
#46Manufacturing method of semiconductor structure
#47Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#48MEMS devices and methods of forming thereof
#49Micro-device structures with etch holes
#50Micromechanical sensor device and corresponding production method
#51SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE
#52Methods of fabricating micro electro-mechanical systems structures
#53MEMS device, manufacturing method of the same, and integrated MEMS module using the same
#54Methods for forming a MEMS device layer on an active device layer and devices formed thereby
#55Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method
#56Micro-electro-mechanical system (MEMS) thermal sensor
#57Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS
#58MEMS devices and methods of forming thereof
#59Piezoelectric microelectromechanical resonator device and corresponding manufacturing process
#60MEMS and NEMS structures
#61Curved micromachined ultrasonic transducer membranes
#62Manufacturing method of semiconductor structure
#63METHODS OF FABRICATING SEMICONDUCTOR STRUCTURES INCLUDING CAVITIES FILLED WITH A SACRIFICIAL MATERIAL
#64Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
#65Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#66Gas sensor, sensor array, and manufacturing method thereof
#67Piezoelectric acoustic MEMS transducer and fabrication method thereof
#68Ultrasonic transducer, manufacturing method thereof, and ultrasonic imaging device
#69Micro check valve and system with multiple micro check valves and method for the production thereof
#70ACOUSTIC DEVICE AND METHOD OF FORMING THE SAME
#71MEMS devices and processes
#72Micro-electro-mechanical system (MEMS) thermal sensor
#73MEMS microphone and method of manufacturing the same
#74Piezoelectric acoustic MEMS transducer and fabrication method thereof
#75Sensor
#76Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the same
#77MEMS microphone and method for manufacturing the same
#78Micro-device having a plurality of mobile elements arranged in a plurality of embedded cavities
#79SEMICONDUCTOR DEVICES WITH CAVITIES AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES WITH CAVITIES
#80Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#81Integrated structure of MEMS microphone and pressure sensor and manufacturing method for the integrated structure
#82Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object
#83Methods of fabricating semiconductor structures including cavities filled with a sacrificial material
#84Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
#85Semiconductor devices with cavities and methods for fabricating semiconductor devices with cavities
#86Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)
#87Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation
#88MEMS Display Manufacturing Method
#89Photolithography Structures and Methods
#90Component of a biosensor and process for production
#91Magnetoelastically actuated MEMS device and methods for its manufacture