Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

Electrical contacts using an array of micromachined flexures

Microelectromechanical infrared sensing device and fabrication method thereof

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

Methods for forming a MEMS device layer on an active device layer and devices formed thereby

Method and system for fabricating a microelectromechanical system device with a movable portion using anodic etching of a sacrificial layer

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

Method for fabricating MEMS device integrated with a semiconductor integrated circuit

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof

PCB speaker and method for micromachining speaker diaphragm on PCB substrate

Refractory seed metal for electroplated MEMS structures

Method for fabricating suspended MEMS structures

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-Electro-Mechanical System (MEMS) structures and design structures

Method to improve cantilever process performance

Ultrasonic transducer, method of producing same, and ultrasonic probe using same

Micro-electro-mechanical system (MEMS) structures and design structures

Method for forming micro-electro-mechanical system (MEMS) beam structure

CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES

REMOVAL OF MOLYBDENUM

Horizontal coplanar switches and methods of manufacture

HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS

Horizontal coplanar switches and methods of manufacture

ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASONIC PROBE USING SAME

Structuring three-dimensional components with non-diffusing noble or special metals and their alloys, with use being made of sputter technology

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Manufacturing a MEMS element having cantilever and cavity on a substrate

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

Method of manufacturing MEMS sensor and MEMS sensor

Electrical conditioning of MEMS device and insulating layer thereof

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Method for producing implant structures for contacting or electrostimulation of living tissue cells or nerves

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

Method for forming gaps in micromechanical device and micromechanical device

Method for fabricating a microstructure

Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS

SILICON ON METAL FOR MEMS DEVICES

Method for forming a hermetically sealed cavity

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

Electrical conditioning of MEMS device and insulating layer thereof

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

Process for forming microstructures

Fabrication of silicon micro-mechanical structures

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

Method for forming MEMS cavity structure

Fabrication of multilayered carbon MEMS devices