84073 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Bulk micromachining Porous silicon
Method for manufacturing at least one membrane system, membrane system for a micromechanical sensor, and component
#2Fabricating calcite nanofluidic channels
#3Multi-purpose MEMS thermopile sensors
#4Multi-purpose MEMS thermopile sensors
#5Fabricating calcite nanofluidic channels
#6Semiconductor device and method of producing a semiconductor device
#7Ultra-high charge density electrets and method of making same
#8Methods for creating fluidic cavities by transmembrane etching through porous membranes and structures made thereby and uses of such structures
#9Semiconductor device and method of producing a semiconductor device
#10Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#11Single silicon wafer micromachined thermal conduction sensor
#12Island etched filter passages
#13Nonparallel island etching
#14Substrate etch
#15MEMS device having a getter
#16Vacuum-cavity-insulated flow sensors
#17Method for fabricating electronic device package
#18Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface
#19Bonding method using porosified surfaces for making stacked structures
#20Single silicon wafer micromachined thermal conduction sensor
#21Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate
#22Vacuum cavity-insulated flow sensors
#23Bonding method using porosified surfaces for making stacked structures
#24Method for forming a multilayer structure
#25Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof
#26Formation Of Nanoporous Materials
#27Method for producing an electro-mechanical microsystem
#28Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate
#29Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
#30Micromechanical component and method for the manufacture thereof
#31Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component
#32Electronic device package and fabrication method thereof
#33Method for producing a component, and sensor element
#34Apparatus and method for converting energy
#35Method of fabricating a MEMS/NEMS electromechanical component
#36Microscopic structure packaging method and device with packaged microscopic structure
#37Method for producing a micromechanical component having a thin-layer capping
#38Method of fabricating an electromechanical device including at least one active element
#39CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining
#40Semiconductor component configured as a diaphragm sensor
#41Method for producing porous microneedles and their use
#42Micromechanical semiconductor sensor
#43Method for producing a semiconductor component and a semiconductor component produced according to the method
#44Microelectromechanical device and method utilizing a porous surface
#45Method for manufacturing semiconical microneedles and semiconical microneedles manufacturable by this method
#46Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor
#47LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON THE USE OF POROUS SEALED AIR CAVITY TECHNOLOGY OR MICROCHANNEL TECHNOLOGY
#48Microelectromechanical device and method utilizing a porous surface
#49Micro-Electro-mechanical (MEMS) encapsulation using buried porous silicon
#50Microelectromechanical device and method utilizing a porous surface
#51Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
#52Semiconductor device having a suspended micro-system
#53Methods of making and modifying porous devices for biomedical applications
#54Thermal electromagnetic radiation detector with alveolate structure
#55Method for producing a component having a semiconductor substrate and component
#56Nanostructured casting of organic and bio-polymers in porous silicon templates
#57Method of fabricating micro-needle array
#58Manufacturing method of a MEMS structure, a cantilever-type MEMS structure, and a sealed fluidic channel
#59Micromechanical component and method
#60Method of making a microelectromechanical (MEM) device using porous material as a sacrificial layer
#61Method for manufacturing a micromechanical sensor element
#62Method and micromechanical component
#63Method for producing a semiconductor component and a semiconductor component produced according to the method
#64Sensor with at least one micromechanical structure, and method for producing it
#65Method of making a differential pressure sensor
#66Method for forming macropores in a layer and products obtained thereof
#67Method for manufacturing a membrane sensor
#68Method for manufacturing a diaphragm sensor
#69Method for the production of a microstructure comprising a vacuum cavity and a microstructure
#70Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology
#71Process for fabricating a semiconductor device having a suspended micro-system and resultant device
#72Method for producing cavities having optically transparent wall
#73Micromechanical apparatus, pressure sensor, and method
#74Direct patterning of silicon by photoelectrochemical etching
#75Pseudo SOI process