84088 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material; Etching; Controlling etch progression by doping limited material regions
Semiconductor device manufacturing method
#2Method for creating patterns
#3Microstructure processing method and microstructure processing apparatus
#4MEMS microphone having improved sensitivity and method for the production thereof
#5DEVICES WITH THINNED WAFER
#6Process for manufacturing a microelectromechanical interaction system for a storage medium
#7Single crystal silicon membrane with a suspension layer, method for fabricating the same, and a micro-heater
#8Etching trenches in a substrate
#9Method for creating a micromechanical membrane structure and MEMS component
#10Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination
#11Method of forming an undercut microstructure
#12Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate
#13Method of fabricating a MEMS/NEMS electromechanical component
#14Single SOI wafer accelerometer fabrication process
#15Micromechanical semiconductor sensor
#16Boron doped shell for MEMS device
#17Method for manufacturing floating structure of microelectromechanical system
#18Process for manufacturing a microelectromechanical interaction system for a storage medium
#19Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor
#20Optical components and production thereof
#21Support structure for MEMS device and methods therefor
#22Method of producing semiconductor device
#23Method for manufacturing a membrane sensor
#24Semiconductor device and method of producing the same