84089 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material; Etching; Controlling etch progression Monitoring physical parameters in the etching chamber, e.g. pressure, temperature or gas composition
Methods and systems for transmission and detection of free radicals
#2Cryogenic atomic layer etch with noble gases
#3Cryogenic atomic layer etch with noble gases
#4Methods for tuning plasma potential using variable mode plasma chamber
#5Method for producing a reflection-reducing layer system
#6System implementing machine learning in complex multivariate wafer processing equipment
#7Method and process of implementing machine learning in complex multivariate wafer processing equipment
#8Methods and systems for transmission and detection of free radicals
#9Chemical liquid treatment apparatus and chemical liquid treatment method
#10Selective patterning of titanium encapsulation layers
#11Selective patterning of an integrated fluxgate device
#12Silicon-based component with at least one chamfer and its fabrication method
#13Micromechanical component with a reduced contact surface and its fabrication method
#14Chemical liquid treatment apparatus and chemical liquid treatment method
#15Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers
#16Method for etching a layer on a silicon semiconductor substrate
#17Trench depth monitor for semiconductor manufacturing
#18Methods of making a MEMS device by monitoring a process parameter
#19Method and apparatus for monitoring a microstructure etching process
#20Method And Apparatus For Monitoring Plasma Conditions In An Etching Plasma Processing Facility
#21Wet etch processing
#22APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH
#23Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
#24Method and processing system for monitoring status of system components
#25Thin film resistor etch
#26Enhanced microfabrication using electrochemical techniques