84090 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material; Etching; Controlling etch progression with the electric potential of an electrochemical etching
Method and system for fabricating a microelectromechanical system device with a movable portion using anodic etching of a sacrificial layer
#2Method of production of semiconductor device having semiconductor layer and support substrate spaced apart by recess
#3Spectrally and temporally engineered processing using photoelectrochemistry
#4Spectrally and temporally engineered processing using photoelectrochemistry
#5Methods for producing a cavity within a semiconductor substrate
#6Methods for producing a cavity within a semiconductor substrate
#7Method for manufacturing capacitive electromechanical transducer
#8SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SUBSTRATES
#9Surfactant-enhanced protection of micromechanical components from galvanic degradation
#10Enhanced microfabrication using electrochemical techniques