84092 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material; Etching; Controlling etch progression Processes for controlling etch progression not provided for in -
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
#2MEMS Array Structures for Gyroscopes with High Resonant Frequencies
#3SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD OF FABRICATING THE SAME
#4MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
#5CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
#6Microfabrication of omni-view peripheral scanning system
#7Method for manufacturing semiconductor substrate, method for manufacturing damascene wiring structure, semiconductor substrate, and damascene wiring structure
#8Method for manufacturing micromechanical structures in a device wafer
#9Structure forming method and device
#10Processing method and plasma processing apparatus
#11MEMS microphone and manufacturing method for making same
#12Atomic layer etching using a combination of plasma and vapor treatments
#13Method of production of semiconductor device having semiconductor layer and support substrate spaced apart by recess
#14Method for manufacturing micromechanical structures in a device wafer
#15Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy
#16METHOD OF FORMING AN ON-PITCH SELF-ALIGNED HARD MASK FOR CONTACT TO A TUNNEL JUNCTION USING ION BEAM ETCHING
#17Device manufacturing method and device manufacturing apparatus
#18Atomic layer etching of ALOusing a combination of plasma and vapor treatments
#19MEMS-based method for manufacturing sensor
#20Vacuum-cavity-insulated flow sensors
#21Method of forming an on-pitch self-aligned hard mask for contact to a tunnel junction using ion beam etching
#22Control over ammonium fluoride levels in oxide etchant
#23Etching apparatus and methods
#24Micropores and methods of making and using thereof
#25Vacuum cavity-insulated flow sensors
#26Chip, method for producing a chip and device for laser ablation
#27MULTICOMPONENT SACRIFICIAL STRUCTURE
#28Methods and devices for immobilization of single particles in a virtual channel in a hydrodynamic trap
#29Micropores and methods of making and using thereof
#30METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY
#31SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SUBSTRATES
#32Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#33Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#34Structure in a substrate for the manufacturing of a semiconductor device and process for manufacturing of a semiconductor device
#35Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#36Method for manufacturing a micro-electro-mechanical structure
#37Liquid-based gravity-driven etching-stop technique for controlling structure dimension
#38Method of manufacturing a wiring board
#39Method and system for xenon fluoride etching with enhanced efficiency
#40Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith
#41Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material
#42Etching process