84100 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Film patterning; Imprinting Imprinting techniques not provided for in
A METHOD FOR IMPRINTING MICROPATTERNS ON A SUBSTRATE OF A CHALCOGENIDE GLASS
#2NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MANUFACTURING THE SAME
#3Imprinted substrates
#4Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors
#5Imprint apparatus and method of controlling the same
#6NANOINJECTION MOLDING
#7Methods and systems for fast imprinting of nanometer scale features in a workpiece
#8Imprinted substrates
#9Resin composition, dry-etching resist mask, and patterning method
#10Thin capping for MEMS devices
#11Methods and systems for fast imprinting of nanometer scale features in a workpiece
#12Pattern forming method
#13SYSTEM AND METHOD FOR IMPRINT-GUIDED BLOCK COPOLYMER NANO-PATTERNING
#14Nano imprint technique with increased flexibility with respect to alignment and feature shaping
#15System for measuring a shape, method for measuring a shape, and computer program product
#16METHOD OF FORMING RELIEF STRUCTURES
#17Multilevel imprint lithography
#18Wear-resistant, carbon-doped metal oxide coatings for MEMS and nanoimprint lithography
#19Stamping methods and devices
#20METHOD OF PREPARING A POLYMER FILM HAVING NANOSCALE FEATURES AT THE SURFACE AND THAT IS MICROSTRUCTURED IN ITS THICKNESS OVER ALL OR PART OF THIS FILM IN ACCORDANCE WITH A PARTICULAR SYSTEM
#21Fluorescent photopolymerizable resins and uses thereof
#22METHODS FOR MAKING CONTINUOUS NANOCHANNELS
#23METHODS FOR PATTERNING ELECTRONIC ELEMENTS AND FABRICATING MOLDS
#24Hierarchical nanopatterns by nanoimprint lithography
#25METHOD OF FORMING FINE PATTERN
#26Nano imprint technique with increased flexibility with respect to alignment and feature shaping
#27Imprint Mask and Method for Defining a Structure on a Substrate
#28Reduction of a feature dimension in a nano-scale device
#29Site-selectively modified micro-and nanostructures and the methods of their fabrication
#30Method of fabricating a biosensor
#31Three-dimensional gels that have microscale features
#32Nano impression lithographic process which involves the use of a die having a region able to generate heat
#33Method for producing means of connecting and/or soldering a component
#34Method for adhering materials together
#35Lift-off material
#36Reduction of a feature dimension in a nano-scale device
#37Capacitive measurement method and system for nanoimprint process monitoring