Engine component

Deposition method and deposition apparatus

Carbon deposition-etch-ash gap fill process

Method for depositing one or more polycrystalline silicon layers on substrate

Semiconductor constructions, methods of forming conductive structures and methods of forming DRAM cells

Enhanced etch and deposition profile control using plasma sheath engineering

Methods of improving tungsten contact resistance in small critical dimension features

Method for producing a three-dimensional structure and three-dimensional structure

Film deposition method and film deposition apparatus

Array of metallic nanotubes

ENHANCED MATERIALS AND INTERFACIAL PERFORMANCE VIA INFILTRATION

Method and apparatus for forming silicon film

Method for producing gas barrier plastic molded body

Gas-barrier plastic molded product and manufacturing process therefor

Methods for modulating step coverage during conformal film deposition

Tungsten feature fill

Integration of bottom-up metal film deposition

Methods of forming conductive structures and methods of forming DRAM cells

Method of fabricating semiconductor device

Controlled coating apparatus, systems, and methods

Charged particle beam apparatus, thin film forming method, defect correction method and device forming method

Method of plasma activated deposition of a conformal film on a substrate surface

Multiple vapor sources for vapor deposition

Semiconductor device manufacturing method

Method for plasma-treating workpieces

Syringe with integrated needle

Methods for forming a contact metal layer in semiconductor devices

Quality inspection of container coatings

Method for depositing phosphosilicate glass

Method for producing ultra-thin tungsten layers with improved step coverage

PCVD method and apparatus

HYBRID POROUS MATERIALS AND MANUFACTURING METHODS AND USES THEREOF

Method for the plasma-enhanced treatment of internal surfaces of a hollow body, fluid separator, and use thereof

Polymeric substrate having an etched-glass-like surface and a microfluidic chip made of said polymeric substrate

Oxygen diffusion barrier comprising Ru

Thin film forming method and film forming apparatus

Method of fabricating a ceramic component

Semiconductor device including a plug and method for manufacturing the same

Apparatuses and Methods for Large-Scale Production of Hybrid Fibers Containing Carbon Nanostructures and Related Materials

Methods of attaching a polycrystalline diamond compact to a substrate

METAL POWDER, METHOD FOR PREPARING THE SAME, AND MULTILAYERED CERAMIC CAPACITOR INCLUDING INNER ELECTRODE MADE OF METAL POWDER

PECVD coating methods for capped syringes, cartridges and other articles

Conformal doping via plasma activated atomic layer deposition and conformal film deposition

Depositing material on fibrous textiles using atomic layer deposition for increasing rigidity and strength

METHOD OF FORMING NOBLE METAL LAYER USING OZONE REACTION GAS

DEPOSITING MATERIAL WITH ANTIMICROBIAL PROPERTIES ON PERMEABLE SUBSTRATE USING ATOMIC LAYER DEPOSITION

Silicon Germanium Core Fiber

Film forming method and film forming apparatus

Downhole motor with diamond-like carbon coating on stator and/or rotor and method of making said downhole motor

Method and apparatus for forming silicon film

Systems and methods for controlling etch selectivity of various materials

Method and device for plasma-treating workpieces

Integrated process modulation for PSG gapfill

Plasma Processing Apparatus

Chemical vapor infiltration apparatus and process

Magnetically Enhanced Thin Film Coating Method and Apparatus

Methods and apparatus for controlled chemical vapor deposition

Ion-assisted direct growth of porous materials

Thin Film Filling Method

Composite materials for battery applications

Barrel

Write pole and shield with different taper angles

Film deposition apparatus and film deposition method

Film deposition method and film deposition apparatus

Deposition method

Vessels, contact surfaces, and coating and inspection apparatus and methods

Method for adjusting the coolant consumption within actively cooled components, and component

DEVICE CONSTRUCTS AND METHODS OF COATING LUMINESCENT PHOSPHORS FOR DISPLAY AND LIGHTING APPLICATIONS

Method and apparatus for treating containers

Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode

Process for the vapor phase aluminization of a turbomachine metal part and donor liner and turbomachine vane comprising such a liner

METHOD OF SURFACE TREATING MICROFLUIDIC DEVICES

DEPOSITING THIN LAYER OF MATERIAL ON PERMEABLE SUBSTRATE

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE

Method of manufacturing a gas barrier plastic container

Patterned dummy wafers loading in batch type CVD

METHODS OF CONTROLLING TUNGSTEN FILM PROPERTIES

Methods of forming copper wiring and copper film, and film forming system

Polysilicon films by HDP-CVD

RADICAL STEAM CVD

ARTICLES INCLUDING A POROUS SUBSTRATE HAVING A CONFORMAL LAYER THEREON

Method of applying atomic layer deposition coatings onto porous non-ceramic substrates

Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates

External Heating of Substrate Tubes in Plasma Chemical Vapor Deposition Processes

Novel Nanoporous Supported Lyotropic Liquid Crystal Polymer Membranes and Methods of Preparing and Using Same

Rapid and uniform gas switching for a plasma etch process

Method of Fabrication of Carbon Nanofibers on Nickel Foam

SEMICONDUCTOR DEVICE HAVING OXIDIZED METAL FILM AND MANUFACTURE METHOD OF THE SAME

BOTTOM UP FILL IN HIGH ASPECT RATIO TRENCHES

Method for fabricating semiconductor device

METHODS FOR FORMING BARRIER/SEED LAYERS FOR COPPER INTERCONNECT STRUCTURES

SUBSTRATE PROCESSING APPARATUS AND FILM FORMING SYSTEM

STAIN-RESISTANT CONTAINER AND METHOD

Film formation apparatus

Barrier layer, film forming method, and processing system

Starting material for use in forming silicon oxide film and method for forming silicon oxide film using same

Integration of bottom-up metal film deposition

Method of forming conformal film having si-N bonds on high-aspect ratio pattern

Methods of selectively forming a material using parylene coating

Method for manufacturing gas barrier thin film-coated plastic container

Process to deposit diamond like carbon as surface of a shaped object

Apparatus and method for plasma treatment of containers

Tantalum carbide-coated carbon material and production method thereof

Fabricating method of semiconductor device

METHOD FOR FORMING METAL NITRIDE FILM

Soft error rate (SER) reduction in advanced silicon processes

Plasma activated conformal dielectric film deposition

APPARATUSES AND SYSTEMS FOR FABRICATING THREE DIMENSIONAL INTEGRATED CIRCUITS

Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics

Plasma activated conformal dielectric film deposition

Depositing tungsten into high aspect ratio features

Inner electrode for barrier film formation and apparatus for film formation

HDP-CVD SYSTEM

Atomic layer deposition apparatus

Apparatus and Method for Coating Internal Surfaces of a Turbine Engine Component

Method and an arrangement for vapour phase coating of an internal surface of at least one hollow article

SILICON FILM FORMATION METHOD AND SILICON FILM FORMATION APPARATUS

Vapor deposition of silicon dioxide nanolaminates

FILM-FORMING TREATMENT JIG, PLASMA CVD APPARATUS, METAL PLATE AND OSMIUM FILM FORMING METHOD

SILICON NITRIDE FILMS AND METHODS

Plasma activated conformal film deposition

Process, apparatus, and material for making silicon germanuim core fiber

Vessel inspection apparatus and methods

Machine for plasma treatment of containers comprising an integrated vacuum circuit

Method for fabricating semiconductor device with buried gates

Method of processing multilayer film

Film-forming method and film-forming apparatus

Cobalt nitride layers for copper interconnects and methods for forming them

Methods for growing low-resistivity tungsten for high aspect ratio and small features

Device for Treating an Inner Surface of a Work Piece

Integration of bottom-up metal film deposition

Process for the internal coating of hollow bodies using a plasma beam at atmospheric pressure

Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process

Process for manufacturing glass containers and product obtained therewith

Device for Plasma-Assisted Coating of the Inner Side of Tubular Components

Dielectric film formation using inert gas excitation

Film forming method and processing system

Chemical vapor deposition for an interior of a hollow article with high aspect ratio

Substrate processing method

MULTILAYER FILM STRUCTURE, AND METHOD AND APPARATUS FOR TRANSFERRING NANO-CARBON MATERIAL

SYSTEM AND METHOD FOR DEPOSITING COATINGS ON INNER SURFACE OF TUBULAR STRUCTURE

Method for forming Cu electrical interconnection film

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE

Articles of manufacture containing increased stability low concentration gases and methods of making and using the same

VAPOR DEPOSITION REACTOR FOR FORMING THIN FILM ON CURVED SURFACE

HYBRED POLYMER CVI COMPOSITES

SEQUENTIAL DEPOSITION OF TANTALUM NITRIDE USING A TANTALUM-CONTAINING PRECURSOR AND A NITROGEN-CONTAINING PRECURSOR

Single-mode fiber and production method thereof

Applying vapour phase aluminide coating on airfoil internal cavities using improved method

Plasma system

DEVICE FOR THE PLASMA TREATMENT OF WORKPIECES

Process, apparatus, and material for making silicon germanium core fiber

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Semiconductor processing parts having apertures with deposited coatings and methods for forming the same

VAPOR DEPOSITION APPARATUS

Method for manufacturing semiconductor device

Vessel, coating, inspection and processing apparatus

Method for forming copper distributing wires

DLC FILM COATED PLASTIC CONTAINER, AND DEVICE AND METHOD FOR MANUFACTURING THE PLASTIC CONTAINER

METHOD TO ATTACH OR IMPROVE THE ATTACHMENT OF ARTICLES

Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects

METHOD FOR FORMING TUNGSTEN CONTACTS AND INTERCONNECTS WITH SMALL CRITICAL DIMENSIONS

Metal plating using seed film

Enhanced etch and deposition profile control using plasma sheath engineering

PLASMA DEPOSITION APPARATUS

PROCESS FOR PLASMA COATING A POLYPROPYLENE OBJECT

Method of forming conformal dielectric film having Si-N bonds by PECVD

Methods and apparatus for controlled chemical vapor deposition

DLI-MOCVD process for making electrodes for electrochemical reactors

METHODS OF FORMING VAPOR THIN FILMS AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICES INCLUDING THE SAME

Machine for the plasma treatment of containers, comprising offset depressurization/pressurization circuits

Dopant Enhanced Interconnect

PLASMA-DEPOSITED BARRIER COATING INCLUDING AT LEAST THREE LAYERS, METHOD FOR OBTAINING ONE SUCH COATING AND CONTAINER COATED WITH SAME

APPARATUS, METHOD FOR DEPOSITING THIN FILM ON WAFER AND METHOD FOR GAP-FILLING TRENCH USING THE SAME

Method and device for the infiltration of a structure of a porous material by chemical vapour deposition

Method of forming conformal dielectric film having Si-N bonds by PECVD

Method of depositing tungsten film with reduced resistivity and improved surface morphology

Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics

Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics

Method and device for manufacturing an optical preform

METHODS FOR DEPOSITING TUNGSTEN FILMS HAVING LOW RESISTIVITY FOR GAPFILL APPLICATIONS

Method for forming low-carbon CVD film for filling trenches

Film forming method and film forming apparatus

Biodegradable resin bottle and method of producing the same

Filling structures of high aspect ratio elements for growth amplification and device fabrication

Die for molding honeycomb structure and manufacturing method thereof

Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container

Device

Catalytic nanoporous membranes

Container having improved ease of discharge product residue, and method for the production thereof

HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system

High density plasma gapfill deposition-etch-deposition process etchant

Apparatus and method for the plasma treatment of hollow bodies

METHOD OF PLASMA TREATMENT OF A SURFACE

Supply device

Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same

Method of forming non-conformal layers

Double-sealing device for a machine for the plasma treatment of containers

CVD FILM FORMING METHOD AND CVD FILM FORMING APPARATUS

Articles with Two Crystalline Materials and Method of Making Same

Method of coating inner and outer surfaces of pipes for thermal solar and other applications

Spatially controlled atomic layer deposition in porous materials

RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma

Protective layer to enable damage free gap fill

Plasma processing device, plasma processing method, and plasma surface processing method

Method and device for plasma-assisted chemical vapour deposition on the inner wall of a hollow body

Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers

Synthetic resin bottle

SILICON STRUCTURE HAVING AN OPENING WHICH HAS A HIGH ASPECT RATIO, METHOD FOR MANUFACTURING THE SAME, SYSTEM FOR MANUFACTURING THE SAME, AND PROGRAM FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING ETCHING MASK FOR THE SILICON STRUCTURE

CELLULAR LATTICE STRUCTURES WITH MULTIPLICITY OF CELL SIZES AND RELATED METHOD OF USE

Method of forming noble metal layer using ozone reaction gas

Heat treatment oven with inductive heating

Microwave plasma processing device

METHOD FOR PRODUCING SILICON OXIDE FILM, CONTROL PROGRAM THEREOF, RECORDING MEDIUM AND PLASMA PROCESSING APPARATUS

METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE

Reactive gases with concentrations of increased stability and processes for manufacturing same

HDP-CVD SiON films for gap-fill

Apparatus and method for application of a thin barrier layer onto inner surfaces of wafer containers

Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor

METHOD AND APPARATUS FOR SURFACE TREATMENT OF CONTAINERS OR OBJECTS

Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component

Thin diamond like coating for semiconductor processing equipment

Method and Device for Producing Process Gases for Vapor Phase Deposition

Method for forming Ta-Ru liner layer for Cu wiring

Method and device for the internal plasma treatment of hollow bodies

Vapor deposited film by plasma CVD method

BARRIER LAYER

Fine laminar barrier protective layer

Inner coating of lamp vessels, such as discharge vessels of gas discharge lamps

Apparatus for PECVD deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device

DIAMOND-DIAMOND COMPOSITES

METHOD AND PLANT FOR SIMULTANEOUSLY COATING INTERNAL AND EXTERNAL SURFACES OF METAL ELEMENTS, IN PARTICULAR BLADES FOR TURBINES

Gas Supply Pipe for Plasma Treatment

Articles of manufacture containing increased stability low concentration gases and methods of making and using the same

Methods for forming a silicon oxide layer over a substrate

Method and system for improving dielectric film quality for void free gap fill

Synthetic resin containers with high barrier property

Process for the vapor phase aluminization of a turbomachine metal part and donor liner and turbomachine vane comprising such a liner

Method and Device for Testing the Quality of a Metallic Coating

Method of aluminization in the vapor phase on hollow metal parts of a turbomachine

Plasma processing plant

Reduction of etch-rate drift in HDP processes

Semiconductor processing parts having apertures with deposited coatings and methods for forming the same

Method of forming titanium film by CVD

APPARATUS FOR TREATING WORKPIECES

Impurity control in HDP-CVD DEP/ETCH/DEP processes

Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container

Expedited manufacture of carbon-carbon composite brake discs

Method of densifying porous articles

Protective coating applied to metallic reactor components to reduce corrosion products into the nuclear reactor environment

Chemical vapor deposition of titanium

RUTHENIUM FILM FORMATION METHOD AND COMPUTER READABLE STORAGE MEDIUM

Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques

Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films

Apparatus and method for coating internal surfaces of a turbine engine component

METHOD FOR FABRICATING AN INTERLAYER DIELECTRIC IN A SEMICONDUCTOR DEVICE

Process sequence for doped silicon fill of deep trenches

GAPFILL EXTENSION OF HDP-CVD INTEGRATED PROCESS MODULATION SIO2 PROCESS

Film forming apparatus and film forming method

Plasma immersion ion processing for coating of hollow substrates

Method for Monitoring a Plasma, Device for Carrying Out this Method, Use of this Method for Depositing a Film Onto a Pet Hollow Body

Seed-Assisted MOCVD Growth of Threshold Switching and Phase-Change Materials

Method and system for forming thin films

Cooled device for plasma depositing a barrier layer onto a container

Process for Plasma Coating a Nanocomposite Object

Semiconductor device having oxidized metal film and manufacture method of the same

Methods for growing low-resistivity tungsten for high aspect ratio and small features

Cobalt nitride layers for copper interconnects and methods for forming them

METHOD FOR PRODUCING HYDROGEN GAS SEPARATION MATERIAL

Method for pre-conditioning a precursor vaporization system for a vapor deposition process

Method for heating a substrate prior to a vapor deposition process

Hearth plate including side walls defining a processing volume

Rotating Machines for Treating Containers

Plasma enhanced ALD process for copper alloy seed layers

Method For The Manufacture Of A Reactor To Separate Gases

Apparatus for plasma-enhanced chemical vapor deposition (PECVD) of an internal barrier layer inside a container, said apparatus including a gas line isolated by a solenoid valve

METHODS AND DEVICES FOR COATING AN INTERIOR SURFACE OF A PLASTIC CONTAINER

Zirconium-doped zinc oxide structures and methods

Fabrication of composite materials using atomic layer deposition

Process for producing shaped bodies of carbon fiber reinforced carbon and shaped body produced by the process

Process For Plasma Coating a Polypropylene Object

Method for chemical infiltration in the gas phase for the densification of porous substrates with pyrolytic carbon

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE

Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates

Methods, apparatuses, and systems for fabricating three dimensional integrated circuits

Method for Manufacturing a Pecvd Carbon Coated Polymer Article and Article Obtained by Such Method

MULTI-STEP DEP-ETCH-DEP HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION PROCESSES FOR DIELECTRIC GAPFILLS

Fabrication of semiconductor metamaterials

Non-wetting coating on a fluid ejector

Deposition process for graded cobalt barrier layers

Plasma Processing Apparatus with Scanning Injector and Plasma Processing Method

Pressure swing CVI/CVD

Semiconductor device having oxidized metal film and manufacture method of the same

PLASMA DEPOSITION PROCESS WITH VARIABLE PROCESS PARAMETERS

INSTALLATION FOR DEPOSITING, BY MEANS OF A MICROWAVE PLASMA, AN INTERNAL BARRIER COATING ON THERMOPLASTIC CONTAINERS

GAP-FILL DEPOSITIONS INTRODUCING HYDROXYL-CONTAINING PRECURSORS IN THE FORMATION OF SILICON CONTAINING DIELECTRIC MATERIALS

Method and an apparatus for the coating of a base body

Semiconductor device having oxidized metal film and manufacture method of the same

Installation for depositing, by means of a microwave plasma, an internal barrier coating in thermoplastic containers

Raw Material Solution for Metal Organic Chemical Vapor Deposition and Composite Oxide-Based Dielectric Thin Film Produced by Using the Raw Material