120169 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material; Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides; Carbides Silicon carbide
Method for manufacturing substrate
#302SiC material and SiC composite material
#303GAS PIPING SYSTEM, CHEMICAL VAPOR DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND METHOD FOR PRODUCING SiC EPITAXIAL WAFER
#304SIC EPITAXIAL GROWTH APPARATUS
#305Methods of encapsulation
#306CHEMICAL VAPOR DEPOSITION APPARATUS
#307Method of producing a silicon compound material and apparatus for producing a silicon compound material
#308Wafer support, chemical vapor phase growth device, epitaxial wafer and manufacturing method thereof
#309Continuous multiple tow coating reactor
#310Gas distribution for chemical vapor deposition/infiltration
#311Coated drill
#312Electrophotographic photosensitive member and method for producing electrophotographic photosensitive member
#313Film forming apparatus
#314Method for enabling optimized material deposition
#315COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM
#316Coated article
#317VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTED DISILANES
#318Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device
#319Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#320Ceramic matrix composite manufacturing
#321Ceramic matrix full hoop blade track
#322Method for producing SiC epitaxial wafer including forming epitaxial layer under different conditions
#323High temperature glass-ceramic matrix with embedded reinforcement fibers
#324Neural interface probe employing amorphous silicon carbide
#325Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device
#326Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#327Device for coating one or more yarns by a vapor deposition method
#328CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS PRECURSOR INTERACTION
#329Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
#330REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILICON-CONTAINING AND CARBON-CONTAINING PRECURSORS
#331Continuous fiber-reinforced silicon carbide member, manufacturing method thereof, and nuclear reactor structural member
#332Selective atomic layer deposition with post-dose treatment
#333Method of manufacturing semiconductor device
#334Die and piston of an SPS apparatus, SPS apparatus comprising same, and method of sintering, densification or assembly in an oxidising atmosphere using said apparatus
#335Display device with encapsulation layer with varying ratios of carbon to silicon and oxygen to silicon and method of fabricating the same
#336METHOD OF MANUFACTURE
#337Epitaxial growth method for silicon carbide
#338Wire grid polarizer with protective coating
#339SiC composite substrate and method for manufacturing same
#340Manufacturing method of SiC composite substrate
#341Process, a structure, and a supercapacitor
#342Method for producing SiC epitaxial wafer and apparatus for producing SiC epitaxial wafer
#343Boron doped tungsten carbide for hardmask applications
#344Method for processing a holding plate, in particular for a clamp for holding a wafer
#345Epitaxial wafer and method for manufacturing same
#346Growing epitaxial 3C-SiC on single-crystal silicon
#347Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#348Method of manufacturing semiconductor device
#349Vapor phase growth method
#350METHODS FOR DEPOSITING FLOWABLE SILICON CONTAINING FILMS USING HOT WIRE CHEMICAL VAPOR DEPOSITION
#351A METHOD AND A DEVICE FOR COATING AN ENDOPROSTHESIS HAVING A BASE BODY
#352Precursors and flowable CVD methods for making low-k films to fill surface features
#353Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
#354Silicon-based films and methods of forming the same
#355Ceramic matrix composite reinforced material
#356Method for manufacturing silicon carbide epitaxial substrate, silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and silicon carbide semiconductor device
#357Remote plasma based deposition of graded or multi-layered silicon carbide film
#358SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS
#359Process for manufacturing SiC composite ceramics
#360Seal coats to prevent silicon loss during re-melt infiltration of Si containing composites
#361Monolayer film mediated precision film deposition
#362Epitaxial wafer manufacturing method, epitaxial wafer, semiconductor device manufacturing method, and semiconductor device
#363Selective atomic layer deposition with post-dose treatment
#364Device and method for producing silicon carbide
#365SiC-coated carbon composite material
#366Scratch-resistant materials and articles including the same
#367Epitaxial silicon carbide single crystal wafer and process for producing the same
#368Remote plasma based deposition of oxygen doped silicon carbide films
#369Method of manufacturing a SiC composite fuel cladding with inner Zr alloy liner
#370Method for manufacturing SiC epitaxial wafer by simultaneously utilizing an N-based gas and a CI-based gas, and SiC epitaxial growth apparatus
#371Crystal growth apparatus, method for manufacturing silicon carbide single crystal, silicon carbide single crystal substrate, and silicon carbide epitaxial substrate
#372Wafer support, chemical vapor phase growth device, epitaxial wafer and manufacturing method thereof
#373Methods of encapsulation
#374Formation of SiOC thin films
#375SILICON CARBIDE SUBSTRATE AND METHOD OF MANUFACTURING SILICON CARBIDE SUBSTRATE
#376Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus
#377Substrate mounting member, wafer plate, and SiC epitaxial substrate manufacturing method
#378Process for making low-resistivity CVC
#379Environmental barrier fiber coating
#380SiC epitaxial wafer and method for manufacturing the same
#381COATING INCREASING THE FRICTION COEFFICIENT AND PRODUCTION THEREOF BY MEANS OF ATMOSPHERIC PRESSURE PLASMA COATING
#382METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
#383Method for manufacturing SiC epitaxial wafer and SiC epitaxial wafer
#384Acetylide-based silicon precursors and their use as ALD/CVD precursors
#385Method of producing a silicon carbide single-crystal substrate by epitaxial growth of a SiC epitaxial film on a SiC substrate
#386EPITAXIAL GROWTH APPARATUS, EPITAXIAL GROWTH METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT
#387Susceptor and method for manufacturing same
#388Method of manufacturing semiconductor device by forming and modifying film on substrate
#389CHUCK PIN, METHOD FOR MANUFACTURING A CHUCK PIN, APPARATUS FOR TREATING A SUBSTRATE
#390Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device
#391SIC EPITAXIAL WAFER, MANUFACTURING APPARATUS OF A SIC EPITAXIAL WAFER, FABRICATION METHOD OF A SIC EPITAXIAL WAFER, AND SEMICONDUCTOR DEVICE
#392Electrical de-icing for aircraft
#393Silicon carbide single-crystal substrate, silicon carbide epitaxial substrate and method of manufacturing them
#394METHOD OF MANUFACTURING SiC SINGLE CRYSTAL
#395Rapid ceramic matrix composite production method
#396Silicon carbide epitaxial wafer and process for producing same
#397SiC epitaxial wafer and method for producing same, and device for producing SiC epitaxial wafer
#398Wafer boat and manufacturing method of the same
#399INTERNAL-COMBUSTION ENGINE CYLINDER BLOCK AND PRODUCTION METHOD THEREFOR
#400Production method of SiC crystal
#401Method for manufacturing silicon carbide epitaxial substrate, and silicon carbide epitaxial substrate
#402METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SUBSTRATE
#403Epitaxial wafer and method for manufacturing same
#404Apparatus for producing SiC epitaxial wafer and method for producing SiC epitaxial wafer
#405Laminated film and flexible electronic device
#406Method for manufacturing a silicon carbide wafer using a susceptor having draining openings
#407Method of desizing fiber
#408Heat-resistant composite material production method and production device
#409Heat-resistant composite material production method and production device
#410Wire Grid Polarizer with Water-Soluble Materials
#411Wire grid polarizer with silane protective coating
#412Oxidation and moisture barrier layers for wire grid polarizer
#413GROUND STATE HYDROGEN RADICAL SOURCES FOR CHEMICAL VAPOR DEPOSITION OF SILICON-CARBON-CONTAINING FILMS
#414Method of manufacturing silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor device
#415Ceramic attachment configuration and method for manufacturing same
#416Method for producing epitaxial silicon carbide wafer
#417Method for manufacturing compound semiconductor epitaxial substrates including heating of carrier gas
#418Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
#419Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants
#420Isothermal warm wall CVD reactor
#421High purity polysilocarb derived silicon carbide powder
#422Advanced process flow for high quality FCVD films
#423SiC-FILM FORMATION DEVICE AND METHOD FOR PRODUCING SiC FILM
#424DEVICE FOR SINGLE MOLECULE DETECTION AND FABRICATION METHODS THEREOF
#425Method for repairing semiconductor processing components
#426METHOD OF PRODUCING HIGH-PURITY CARBIDE MOLD
#427Turbine engine components with chemical vapor infiltrated isolation layers
#428Environmental barrier fiber coating
#429COMPOSITE COMPONENTS WITH COATED FIBER REINFORCEMENTS
#430Reactive fiber interface coatings for improved environmental stability
#431Silicon carbide semiconductor film-forming apparatus and film-forming method using the same
#432Waveguides including novel core materials
#433Silicon-based films and methods of forming the same
#434Retainer, Method For Producing Same And Use Thereof
#435Ceramic matrix composites and methods for producing ceramic matrix composites
#436Method to obtain SiC class of films of desired composition and film properties
#437Scratch-resistant materials and articles including the same
#438METHOD FOR PRODUCING A COMPOSITE MATERIAL WITH A CARBIDE MATRIX
#439Film forming apparatus, susceptor, and film forming method
#440Process for making triple graded CVC-CVD-CVC silicon carbide products
#441Carbon and/or nitrogen incorporation in silicon based films using silicon precursors with organic co-reactants by PE-ALD
#442Film-forming manufacturing apparatus and method
#443STIFF DISCRETE INSERT ARRAY FOR THERMAL PTR MANAGEMENT WITH DESIRED INDUCED STRESS STATE THAT REDUCES TENDENCY FOR WRITE POLE ERASURE
#444MAGNETIC MATERIAL AND METHOD THEREFOR
#445Conformal deposition of silicon carbide films
#446Epitaxial wafer and method for fabricating the same
#447Method for manufacturing silicon carbide thin film
#448Method and apparatus of forming carbon-containing silicon film
#449MANUFACTURING APPARATUS FOR DEPOSITING A MATERIAL AND A SOCKET FOR USE THEREIN
#450Method of manufacturing silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor device
#451Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object
#452Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants
#453Method for manufacturing heat-resistant composite material
#454SiC formed body and method for producing SiC formed body
#455Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films
#456Film formation apparatus and film formation method
#457Piston ring for internal combustion engine
#458Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#459FLEXIBLE COMPOSITE, PRODUCTION THEREOF AND USE THEREOF
#460Graphene-like nanosheet structure network on a substrate and the method for forming the same
#461CERAMIC HEATER
#462Silicon carbide crystal growth in a CVD reactor using chlorinated chemistry
#463Rapid ceramic matrix composite production method
#464Method to obtain SiC class of films of desired composition and film properties
#465Method for the chemical vapor infiltration of refractive substances
#466Barrier layer to SiOC alkali metals
#467Method for deposition of silicon carbide and silicon carbide epitaxial wafer
#468Method for preparing a coating for protecting a part against oxidation
#469CVD APPARATUS, METHOD OF MANUFACTURING SUSCEPTOR USING THE CVD APPARATUS, AND SUSCEPTOR
#470Hot-wire method for depositing semiconductor material on a substrate and device for performing the method
#471Deposition apparatus
#472Method of manufacturing substrates having improved carrier lifetimes
#473Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants
#474COATING INCREASING THE FRICTION COEFFICIENT AND PRODUCTION THEREOF BY MEANS OF ATMOSPHERIC PRESSURE PLASMA COATING
#475Advanced low k cap film formation process for nano electronic devices
#476METHOD AND APPARATUS FOR FORMING C/SiC FUNCTIONALLY GRADED COATING
#477METHODS FOR UV-ASSISTED CONFORMAL FILM DEPOSITION
#478Methods of forming non-oxygen containing silicon-based films
#479Method And Apparatus For Low Temperature ALD Deposition
#480Remote plasma based deposition of SiOC class of films
#481Method for forming silicon-containing dielectric film by cyclic deposition with side wall coverage control
#482Hardmask materials
#483Method for forming Si-containing film using two precursors by ALD
#484Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond
#485Charged particle beam apparatus, thin film forming method, defect correction method and device forming method
#486Methods for UV-assisted conformal film deposition
#487Reaction chamber including a susceptor having draining openings for manufacturing a silicon carbide wafer
#488LAMINATE AND PROCESS FOR PRODUCING LAMINATE
#489SILICON CARBIDE STABILIZING OF SOLID DIAMOND AND STABILIZED MOLDED AND FORMED DIAMOND STRUCTURES
#490Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrate
#491Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and recording medium
#492Carbosilane precursors for low temperature film deposition
#493Method for manufacturing electrophotographic photosensitive member
#494Surface processing method
#495Method of coating surface of inorganic powder particles with silicon-carbon composite and inorganic powder particles coated by the same
#496Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
#497Semiconductor device manufacturing and processing methods and apparatuses for forming a film
#498Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus
#499Heat treatment apparatus
#500Hardmask materials
#501Method of reusing a consumable part for use in a plasma processing apparatus
#502Chemical vapor deposition coating, article, and method
#503Cubic silicon carbide implantable neural prosthetic
#504CERAMIC SUBSTRATE SUPPORTING MEMBER AND METHOD OF MANUFACTURING CERAMIC MEMBER
#505Substrate processing apparatus
#506SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#507Advanced low k cap film formation process for nano electronic devices
#508Bodies coated by SiC and method for creating SiC-coated bodies
#509Method of depositing film by atomic layer deposition with pulse-time-modulated plasma
#510Jig for semiconductor production and method for producing same
#511ADVANCED LOW k CAP FILM FORMATION PROCESS FOR NANO ELECTRONIC DEVICES
#512Catalytic CVD equipment, method for formation of film, process for production of solar cell, and substrate holder
#513Low temperature silicon carbide deposition process
#514SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#515Methods for deposition of silicon carbide and silicon carbonitride films
#516Method of depositing film with tailored comformality
#517Medicinal inhalation device
#518FILM-FORMING MANUFACTURING APPARATUS AND METHOD
#519SEMICONDUCTOR HEAT TREATMENT MEMBER HAVING SIC FILM
#520Semiconductor substrate manufacturing apparatus
#521Susceptor treatment method and a method for treating a semiconductor manufacturing apparatus
#522Methods and apparatus for selective epitaxy of Si-containing materials and substitutionally doped crystalline Si-containing material
#523Chemical vapour deposition system and process
#524SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE MANUFACTURING METHOD
#525CVD APPARATUS
#526Epitaxial silicon carbide monocrystalline substrate and method of production of same
#527METHODS OF SELECTIVELY DEPOSITING AN EPITAXIAL LAYER
#528METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLEMENTING SAID METHOD
#529CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES
#530Substrate coating and method of forming the same
#531Methods of modifying interlayer adhesion
#532Method of manufacturing silicon carbide semiconductor device
#533Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus
#534SILICON CARBIDE-BASED ANTIREFLECTIVE COATING
#535Hardmask materials
#536Hardmask materials
#537Methods of selectively depositing an epitaxial layer
#538Method of making showerhead for semiconductor processing apparatus
#539Method of reducing memory effects in semiconductor epitaxy
#540HEAT TREATMENT APPARATUS
#541METHOD AND SYSTEM FOR DEPOSITING A METAL OR METALLOID ON CARBON NANOTUBES
#542Structures of and methods and tools for forming in-situ metallic/dielectric caps for interconnects
#543Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
#544Surface processing method
#545Composition comprising silicon carbide
#546Substrate processing apparatus with an insulator disposed in the reaction chamber
#547Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate
#548Method of reusing a consumable part for use in a plasma processing apparatus
#549SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MANUFACTURING METHOD
#550FREE-STANDING SILICON CARBIDE ARTICLES FORMED BY CHEMICAL VAPOR DEPOSITION AND METHODS FOR THEIR MANUFACTURE
#551Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture
#552Heat treatment apparatus
#553MICROCRYSTALLINE SILICON ALLOYS FOR THIN FILM AND WAFER BASED SOLAR APPLICATIONS
#554FILM FORMATION METHOD, DIE, AND METHOD OF MANUFACTURING THE SAME
#555METHOD FOR FORMING TRENCH ISOLATION USING GAS CLUSTER ION BEAM PROCESSING
#556ROLL-TO-ROLL PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION METHOD OF BARRIER LAYERS COMPRISING SILICON AND CARBON
#557Structure comprises an As-deposited doped single crystalline Si-containing film
#558Stable power devices on low-angle off-cut silicon carbide crystals
#559Method for forming a dielectric film and novel precursors for implementing said method
#560Method for forming a film on a substrate
#561Method of forming insulation film by modified PEALD
#562Roll-To-Roll Plasma Enhanced Chemical Vapor Deposition Method of Barrier Layers Comprising Silicon And Carbon
#563Film deposition apparatus and film deposition method
#564METHODS FOR FORMING SILICON NITRIDE BASED FILM OR SILICON CARBON BASED FILM
#565Method for forming a semiconductor film including a film forming gas and decomposing gas while emitting a laser sheet
#566MICROCRYSTALLINE SILICON ALLOYS FOR THIN FILM AND WAFER BASED SOLAR APPLICATIONS
#567Ceramic components, coated structures and methods for making same
#568Reactor For Growing Crystals
#569Process for deposition of semiconductor films
#570Method of Manufacturing Substrates Having Improved Carrier Lifetimes
#571Method of modifying interlayer adhesion
#572Method for forming a group III nitride material on a silicon substrate
#573Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method
#574SiC SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING THE SAME, AND MANUFACTURING APPARATUS THEREOF
#575METHOD AND SYSTEM FOR DEPOSITING SILICON CARBIDE FILM USING A GAS CLUSTER ION BEAM
#576Semiconductor device with silicon carbide channel
#577APPARATUS FOR MANUFACTURING SEMICONDUCTOR THIN FILM
#578Method of forming capping structures on one or more material layer surfaces
#579Method for preventing backside defects in dielectric layers formed on semiconductor substrates
#580Advanced low k cap film formation process for nano electronic devices
#581Process for preparing thin layers of nanoporous dielectric materials
#582Method for forming a multiple layer passivation film and a device incorporating the same
#583In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
#584METHOD FOR FORMING AN AIR GAP IN MULTILEVEL INTERCONNECT STRUCTURE
#585Method for depositing films using gas cluster ion beam processing
#586Process for producing silicon compound
#587THIN-FILM MULTILAYER STRUCTURE, COMPONENT COMPRISING SAID STRUCTURE AND ITS METHOD OF DEPOSITION
#588Deposited Film Forming Method, Deposited Film Forming Device, Deposited Film, and Photosensitive Member Provided with the Deposited Film
#589Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#590Production of bulk silicon carbide with hot-filament chemical vapor deposition
#591Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
#592Epitaxial and polycrystalline growth of SiGECand SiCalloy layers on Si by UHV-CVD
#593Ceramic Thin Film On Various Substrates, and Process for Producing Same
#594Process for producing silicon carbide single crystal
#595Method of fabricating organic silicon film, semiconductor device including the same, and method of fabricating the semiconductor device
#596Chemical vapor deposited silicon carbide articles
#597Silicon carbide gas distribution plate and RF electrode for plasma etch chamber
#598STACKED PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF PRODUCING THE SAME
#599Method, system, and apparatus for the growth of SiC and related or similar material, by chemical vapor deposition, using precursors in modified cold-wall reactor
#600Thin films and methods of making them