121370 ⎘
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state; Controlling or regulating Pattern diffusion, e.g. by using masks
METHODS FOR SELECTIVELY DEPOSITING A BORON DOPED SILICON GERMANIUM LAYER ON A SURFACE OF A SUBSTRATE
#2Method for manufacturing substrate for solar cell and substrate for solar cell
#3METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR SOLAR CELL
#4Method for manufacturing substrate for solar cell and substrate for solar cell
#5Semiconductor device manufacturing method and semiconductor device
#6Dopant material for manufacturing solar cells