ClassID:

206372

H01J2237/06341 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources; Cold-cathode sources Field emission

Sub-classes:
Recent Application in this class:
#1
20250357069
2025-11-20

JUNCTION BETWEEN HEXABORIDE-CONTAINING AND TANTALUM-CONTAINING COMPONENTS

#2
20250273422
2025-08-28

CHARGED PARTICLE BEAM DEVICE

#3
20250062095
2025-02-20

PHOTO-ASSISTED ELECTRON BEAM EMITTER

#4
20250054721
2025-02-13

IN-LINE ELECTRON BEAM INSPECTION METHOD FOR SEMICONDUCTOR PROCESSES AND COLD FIELD EMITTER WITH NANOMETER-SCALE PROTRUSION STRUCTURE FOR IN-LINE ELECTRON BEAM INSPECTION EQUIPMENT APPLIED TO SEMICONDUCTOR PROCESSES AND MANUFACTURE METHOD THEREOF

#5
20240379318
2024-11-14

CHARGED PARTICLE BEAM DEVICE

#6
20240079198
2024-03-07

Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same

#7
20230317401
2023-10-05

Electron Source, Method of Manufacturing the Same, And Electron Beam Apparatus Using the Same

#8
20230005695
2023-01-05

ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR SAME

#9
20220367142
2022-11-17

Particle beam device having a deflection unit

#10
20220293387
2022-09-15

Mechanically-stable electron source

#11
20220189725
2022-06-16

Electron emitter and method of fabricating same

#12
20210142975
2021-05-13

Electron emitter and method of fabricating same

#13
20190362927
2019-11-28

Metal protective layer for electron emitters with a diffusion barrier

#14
20190279837
2019-09-12

Electron microscope

#15
20190272968
2019-09-05

Methods and devices for producing an electron beam

#16
20190237289
2019-08-01

Electron beam apparatus

#17
20190172674
2019-06-06

Electron emitter and method of fabricating same

#18
20190096626
2019-03-28

Cold cathode field-emission electron gun, adjustment method for cold cathode field-emission electron gun, sharpening method for emitter, and electron microscope

#19
20190066966
2019-02-28

Field emission electron source, method for manufacturing same, and electron beam device

#20
20180323036
2018-11-08

Gun lens design in a charged particle microscope

#21
20180218874
2018-08-02

Electron microscope electron gun for facilitating position adjustment and electron microscope including same

#22
20180130635
2018-05-10

Electron microscope and method of operating same

#23
20170309437
2017-10-26

Scanning electron microscope

#24
20170229276
2017-08-10

High voltage feedthrough assembly, time-resolved transmission electron microscope and method of electrode manipulation in a vacuum environment

#25
20160358741
2016-12-08

System and method for providing a clean environment in an electron-optical system

#26
20160329184
2016-11-10

Array of carbon nanotube micro-tip structures

#27
20160247658
2016-08-25

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

#28
20160181051
2016-06-23

Nanoparticle-templated lithographic patterning of nanoscale electronic components

#29
20160104597
2016-04-14

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

#30
20150255240
2015-09-10

Method for manufacturing electron source

#31
20150014530
2015-01-15

Charged particle beam apparatus

#32
20150008323
2015-01-08

Device and method for electron emission and device including such an electron emission system

#33
20140077684
2014-03-20

Particle sources and methods for manufacturing the same

#34
20130332116
2013-12-12

Electron microscope and method of operating the same

#35
20130327938
2013-12-12

Electron microscope and method of adjusting the same

#36
20130264496
2013-10-10

Charged particle beam apparatus with cleaning photo-irradiation apparatus

#37
20130234025
2013-09-12

Electron gun emitting under high voltage, in particular for electron microscopy

#38
20130224429
2013-08-29

Carbon nanotube based micro-tip structure and method for making the same

#39
20130134324
2013-05-30

Compact high-voltage electron gun

#40
20130122774
2013-05-16

Fabrication of super ion—electron source and nanoprobe by local electron bombardment

#41
20120085918
2012-04-12

Ion beam irradiation device and method for suppressing ion beam divergence

#42
20120062094
2012-03-15

Electron gun

#43
20110101245
2011-05-05

EVAPORATION SYSTEM

#44
20110101238
2011-05-05

Cold field emitter

#45
20110084219
2011-04-14

Method and apparatus of pretreatment of an electron gun chamber

#46
20110036810
2011-02-17

MANUFACTURING METHOD OF ELECTRON SOURCE

#47
20110001058
2011-01-06

Gas field ion source with coated tip

#48
20100320942
2010-12-23

Electron gun used in particle beam device

#49
20100258724
2010-10-14

Tip-sharpened carbon nanotubes and electron source using thereof

#50
20100200766
2010-08-12

ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME

#51
20100193687
2010-08-05

Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same

#52
20100187433
2010-07-29

IMPROVED PARTICLE BEAM GENERATOR

#53
20100148656
2010-06-17

ELECTRON COLUMN USING CNT-TIP AND METHOD FOR ALIGNMENT OF CNT-TIP

#54
20100102227
2010-04-29

Electron beam apparatus

#55
20100090579
2010-04-15

Device for the field emission of particles and production method

#56
20100084957
2010-04-08

Field emission electron source having carbon nanotube and manufacturing method thereof

#57
20100006447
2010-01-14

METHOD OF PREPARING AN ULTRA SHARP TIP, APPARATUS FOR PREPARING AN ULTRA SHARP TIP, AND USE OF AN APPARATUS

#58
20090314937
2009-12-24

Method and device for producing an image

#59
20090294697
2009-12-03

Charged particle beam apparatus

#60
20090236521
2009-09-24

Method and system for ultrafast photoelectron microscope

#61
20090218508
2009-09-03

COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELECTRON BEAM INSTRUMENTS

#62
20090160308
2009-06-25

Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer

#63
20090160307
2009-06-25

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

#64
20090134127
2009-05-28

Electron beam heating system having carbon nanotubes

#65
20090121160
2009-05-14

Charged particle source with automated tip formation

#66
20090101819
2009-04-23

Energy filter for cold field emission electron beam apparatus

#67
20090001266
2009-01-01

Arrangement and method for compensating emitter tip vibrations

#68
20080315089
2008-12-25

Electron gun, electron beam exposure apparatus, and exposure method

#69
20080284332
2008-11-20

GUN CHAMBER, CHARGED PARTICLE BEAM APPARATUS AND METHOD OF OPERATING SAME

#70
20080283745
2008-11-20

EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME

#71
20080224064
2008-09-18

Charged particle beam apparatus

#72
20080217555
2008-09-11

Systems and methods for a gas field ionization source

#73
20080174225
2008-07-24

Cold field emitter

#74
20080135756
2008-06-12

Charged beam gun

#75
20080067407
2008-03-20

Conductive probe and method for producing the same

#76
20080029700
2008-02-07

Field emission electron gun and electron beam applied device using the same

#77
20080017796
2008-01-24

Method and system for ultrafast photoelectron microscope

#78
20070148991
2007-06-28

Method of fabricating nanodevices

#79
20070114457
2007-05-24

Nano tip and fabrication method of the same

#80
20070057617
2007-03-15

Electron beam source having an extraction electrode provided with a magnetic disk element

#81
20070023672
2007-02-01

Apparatus and method for controlling the beam current of a charged particle beam

#82
20070001574
2007-01-04

CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISSION GUN USING UV OR LASER BEAMS

#83
20060231773
2006-10-19

Charged particle beam apparatus

#84
20060217026
2006-09-28

Method for manufacturing an electron emitter

#85
20060076504
2006-04-13

Electron source, and charged-particle apparatus comprising such an electron source

#86
20060075626
2006-04-13

Single-atom tip and preparation method thereof

#87
20050253069
2005-11-17

Method and system for ultrafast photoelectron microscope

#88
20050194535
2005-09-08

Sample surface inspection method and inspection system

#89
20050092929
2005-05-05

Integrated sub-nanometer-scale electron beam systems

#90
20050001220
2005-01-06

Low power schottky emitter

#91
18665386
2025-08-12

Electrode and filament coupled by adapter

#92
17846498
2023-05-16

Method of producing microrods for electron emitters, and associated microrods and electron emitters

#93
16033987
2019-12-10

High performance inspection scanning electron microscope device and method of operating the same

#94
15056244
2017-07-04

Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device

#95
15040608
2017-04-25

Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter