206372 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources; Cold-cathode sources Field emission
Sub-classes:JUNCTION BETWEEN HEXABORIDE-CONTAINING AND TANTALUM-CONTAINING COMPONENTS
#2CHARGED PARTICLE BEAM DEVICE
#3PHOTO-ASSISTED ELECTRON BEAM EMITTER
#4IN-LINE ELECTRON BEAM INSPECTION METHOD FOR SEMICONDUCTOR PROCESSES AND COLD FIELD EMITTER WITH NANOMETER-SCALE PROTRUSION STRUCTURE FOR IN-LINE ELECTRON BEAM INSPECTION EQUIPMENT APPLIED TO SEMICONDUCTOR PROCESSES AND MANUFACTURE METHOD THEREOF
#5CHARGED PARTICLE BEAM DEVICE
#6Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
#7Electron Source, Method of Manufacturing the Same, And Electron Beam Apparatus Using the Same
#8ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR SAME
#9Particle beam device having a deflection unit
#10Mechanically-stable electron source
#11Electron emitter and method of fabricating same
#12Electron emitter and method of fabricating same
#13Metal protective layer for electron emitters with a diffusion barrier
#14Electron microscope
#15Methods and devices for producing an electron beam
#16Electron beam apparatus
#17Electron emitter and method of fabricating same
#18Cold cathode field-emission electron gun, adjustment method for cold cathode field-emission electron gun, sharpening method for emitter, and electron microscope
#19Field emission electron source, method for manufacturing same, and electron beam device
#20Gun lens design in a charged particle microscope
#21Electron microscope electron gun for facilitating position adjustment and electron microscope including same
#22Electron microscope and method of operating same
#23Scanning electron microscope
#24High voltage feedthrough assembly, time-resolved transmission electron microscope and method of electrode manipulation in a vacuum environment
#25System and method for providing a clean environment in an electron-optical system
#26Array of carbon nanotube micro-tip structures
#27Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip
#28Nanoparticle-templated lithographic patterning of nanoscale electronic components
#29Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
#30Method for manufacturing electron source
#31Charged particle beam apparatus
#32Device and method for electron emission and device including such an electron emission system
#33Particle sources and methods for manufacturing the same
#34Electron microscope and method of operating the same
#35Electron microscope and method of adjusting the same
#36Charged particle beam apparatus with cleaning photo-irradiation apparatus
#37Electron gun emitting under high voltage, in particular for electron microscopy
#38Carbon nanotube based micro-tip structure and method for making the same
#39Compact high-voltage electron gun
#40Fabrication of super ion—electron source and nanoprobe by local electron bombardment
#41Ion beam irradiation device and method for suppressing ion beam divergence
#42Electron gun
#43EVAPORATION SYSTEM
#44Cold field emitter
#45Method and apparatus of pretreatment of an electron gun chamber
#46MANUFACTURING METHOD OF ELECTRON SOURCE
#47Gas field ion source with coated tip
#48Electron gun used in particle beam device
#49Tip-sharpened carbon nanotubes and electron source using thereof
#50ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME
#51Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same
#52IMPROVED PARTICLE BEAM GENERATOR
#53ELECTRON COLUMN USING CNT-TIP AND METHOD FOR ALIGNMENT OF CNT-TIP
#54Electron beam apparatus
#55Device for the field emission of particles and production method
#56Field emission electron source having carbon nanotube and manufacturing method thereof
#57METHOD OF PREPARING AN ULTRA SHARP TIP, APPARATUS FOR PREPARING AN ULTRA SHARP TIP, AND USE OF AN APPARATUS
#58Method and device for producing an image
#59Charged particle beam apparatus
#60Method and system for ultrafast photoelectron microscope
#61COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELECTRON BEAM INSTRUMENTS
#62Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer
#63DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME
#64Electron beam heating system having carbon nanotubes
#65Charged particle source with automated tip formation
#66Energy filter for cold field emission electron beam apparatus
#67Arrangement and method for compensating emitter tip vibrations
#68Electron gun, electron beam exposure apparatus, and exposure method
#69GUN CHAMBER, CHARGED PARTICLE BEAM APPARATUS AND METHOD OF OPERATING SAME
#70EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME
#71Charged particle beam apparatus
#72Systems and methods for a gas field ionization source
#73Cold field emitter
#74Charged beam gun
#75Conductive probe and method for producing the same
#76Field emission electron gun and electron beam applied device using the same
#77Method and system for ultrafast photoelectron microscope
#78Method of fabricating nanodevices
#79Nano tip and fabrication method of the same
#80Electron beam source having an extraction electrode provided with a magnetic disk element
#81Apparatus and method for controlling the beam current of a charged particle beam
#82CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISSION GUN USING UV OR LASER BEAMS
#83Charged particle beam apparatus
#84Method for manufacturing an electron emitter
#85Electron source, and charged-particle apparatus comprising such an electron source
#86Single-atom tip and preparation method thereof
#87Method and system for ultrafast photoelectron microscope
#88Sample surface inspection method and inspection system
#89Integrated sub-nanometer-scale electron beam systems
#90Low power schottky emitter
#91Electrode and filament coupled by adapter
#92Method of producing microrods for electron emitters, and associated microrods and electron emitters
#93High performance inspection scanning electron microscope device and method of operating the same
#94Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
#95Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter