H01J2237/0635 - CPC Classification Index

#1

20240387140

2024-11-21

MULTIPLE ELECTRON BEAM OPTICS

#2

20230065475

2023-03-02

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTICLE MICROSCOPE

#3

20200144015

2020-05-07

Device for generating a source current of charge carriers

#4

20190378677

2019-12-12

Beam bender

#5

20190049851

2019-02-14

Electron source

#6

20180240640

2018-08-23

Electron source architecture for a scanning electron microscopy system

#7

20170047207

2017-02-16

Electron source

#8

20160247658

2016-08-25

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

#9

20160005566

2016-01-07

Method and system for electron microscope with multiple cathodes

#10

20120168638

2012-07-05

Charged particle source with multiple selectable particle emitters

#11

20110163229

2011-07-07

HIGH THROUGHPUT SEM TOOL

#12

20110148297

2011-06-23

Multi-column electron beam exposure apparatus and magnetic field generation device

#13

20110104976

2011-05-05

Carbon nanotube electron gun

#14

20110073782

2011-03-31

Method of and system for exposing a target

#15

20100320382

2010-12-23

Multi-beam scanning electron beam device and methods of using the same

#16

20100072875

2010-03-25

Surface emission type electron source and drawing device

#17

20090166557

2009-07-02

Charge control apparatus and measurement apparatus equipped with the charge control apparatus

#18

20090152461

2009-06-18

Hole inspection apparatus and hole inspection method using the same

#19

20090124159

2009-05-14

Method of fabrication of cold cathodes on thin diamondlike carbon films irradiated with multicharged ions and field emissive corresponding surfaces

#20

20090039262

2009-02-12

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#21

20080315095

2008-12-25

Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method

#22

20080237483

2008-10-02

Carbon nanotube electron gun

#23

20080067421

2008-03-20

Electron Beam Etching Apparatus and Method for the same

#24

20070257212

2007-11-08

Digital parallel electron beam lithography stamp

#25

20070228296

2007-10-04

Parallel electron beam lithography stamp (PEBLS)

#26

20070114434

2007-05-24

Multi-pixel electron microbeam irradiator systems and methods for selectively irradiating predetermined locations

#27

20070080647

2007-04-12

Hybrid multibeam electronic emission device with controlled divergence

#28

20070018101

2007-01-25

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#29

20060237659

2006-10-26

Imaging system with multi source array

#30

20060054879

2006-03-16

Article comprising gated field emission structures with centralized nanowires and method for making the same

#31

20060001350

2006-01-05

Field emission electron gun and electron beam apparatus using the same

#32

20050214958

2005-09-29

Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method

#33

20050151456

2005-07-14

Electron-beam inspection apparatus and methods of inspecting through-holes using clustered nanotube arrays

#34

20050147148

2005-07-07

Control circuit for controlling an electron-emitting device

#35

20050001178

2005-01-06

Multi-column charged particle optics assembly

#36

16015772

2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

#37

14694710

2016-10-11

Precision substrate material removal using miniature-column charged particle beam arrays