H01J2237/2555 - CPC Classification Index

ClassID:

206529 ⎘

H01J2237/2555 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application Microprobes, i.e. particle-induced X-ray spectrometry

Sub-classes:

H01J2237/2561 » electron 27
H01J2237/2566 » ion 22
H01J2237/2572 » proton 0
H01J2237/2577 » atomic 0

Recent Application in this class:

20250210301

2025-06-26

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE

20230335370

2023-10-19

3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

20220415610

2022-12-29

3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

20160163503

2016-06-09

Electron microscope with plural X-ray detectors for acquiring elemental spectrum

20160054240

2016-02-25

Method of acquiring EBSP patterns

20110024622

2011-02-03

System and method for material analysis of a microscopic element