Patents-Review.com
ClassID:

206551 ⎘

H01J2237/2804 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging method Scattered primary beam

Sub-classes:
Recent Application in this class:
#1
20240355685
2024-10-24

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

 #2
20240105418
2024-03-28

High framerate and high dynamic range electron microscopy

 #3
20230402252
2023-12-14

Charged Particle Beam Device and Image Acquisition Method

 #4
20230238210
2023-07-27

OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM

 #5
20230178332
2023-06-08

METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE PORTION OF A SAMPLE AND COMPUTER PROGRAM PRODUCT

 #6
20230026970
2023-01-26

Electron microscope and method of correcting aberration

 #7
20220319808
2022-10-06

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #8
20220301946
2022-09-22

Electron beam probing techniques and related structures

 #9
20220262597
2022-08-18

Method of measuring relative rotational angle and scanning transmission electron microscope

 #10
20220230842
2022-07-21

PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD

 #11
20220068592
2022-03-03

System and method for bare wafer inspection

 #12
20210381992
2021-12-09

Hyperdimensional scanning transmission electron microscopy and examinations and related systems, methods, and devices

 #13
20210166979
2021-06-03

Electron beam probing techniques and related structures

 #14
20210151291
2021-05-20

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #15
20210082661
2021-03-18

High framerate and high dynamic range electron microscopy

 #16
20210042943
2021-02-11

SCANNING ELECTRON MICROSCOPE

 #17
20200395192
2020-12-17

Method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (EELS) spectrum is acquired

 #18
20200251305
2020-08-06

CHARGED PARTICLE BEAM APPARATUS

 #19
20200227232
2020-07-16

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

 #20
20200027693
2020-01-23

System and method for bare wafer inspection

 #21
20190311881
2019-10-10

Nondestructive sample imaging

 #22
20190295814
2019-09-26

Intelligent pre-scan in scanning transmission charged particle microscopy

 #23
20190279844
2019-09-12

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #24
20190228948
2019-07-25

Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam

 #25
20190198288
2019-06-27

Combined SEM-CL and FIB-IOE microscopy

 #26
20190180975
2019-06-13

Imaging of crystalline defects

 #27
20190043183
2019-02-07

Method for detecting voids and an inspection system

 #28
20190035597
2019-01-31

Scanning electron microscope and image processing apparatus

 #29
20190019651
2019-01-17

Imaging system and imaging method

 #30
20180261422
2018-09-13

Scanning electron microscope

 #31
20180166253
2018-06-14

Image capture assembly and method for electron back scatter diffraction

 #32
20180158646
2018-06-07

Method of image acquisition and electron microscope

 #33
20170271121
2017-09-21

Charged particle beam device

 #34
20170162363
2017-06-08

STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE

 #35
20170084422
2017-03-23

Multi-beam dark field imaging

 #36
20160372304
2016-12-22

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

 #37
20160329186
2016-11-10

Charged particle beam device

 #38
20160276130
2016-09-22

Method of performing spectroscopy in a transmission charged-particle microscope

 #39
20160260578
2016-09-08

Active charged particle tomography

 #40
20160216219
2016-07-28

Devices and systems for spatial averaging of electron backscatter diffraction patterns

 #41
20160163505
2016-06-09

HIGHLY CONDUCTIVE NANOCOMPOSITE, BIOLOGICAL AND SMALL MOLECULE MATERIALS FOR ENHANCED RESIN CONDUCTIVITY

 #42
20160163504
2016-06-09

Charged particle beam device enabling facilitated EBSD detector analysis of desired position and control method thereof

 #43
20160013109
2016-01-14

Overlay measuring method and system, and method of manufacturing semiconductor device using the same

 #44
20150371820
2015-12-24

Charged particle beam apparatus

 #45
20150155133
2015-06-04

Charged particle beam apparatus

 #46
20150108351
2015-04-23

Scanning electron microscope

 #47
20150083912
2015-03-26

Charged particle beam apparatus

 #48
20140361167
2014-12-11

Scanning electron microscope

 #49
20140319340
2014-10-30

Method and apparatus for detecting buried defects

 #50
20140291510
2014-10-02

Charged particle beam apparatus

 #51
20140291508
2014-10-02

Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium

 #52
20140197310
2014-07-17

Method of analyzing a sample and charged particle beam device for analyzing a sample

 #53
20140117231
2014-05-01

Automated mineral classification

 #54
20130256528
2013-10-03

Method and apparatus for detecting buried defects

 #55
20130248706
2013-09-26

Sample analyzing apparatus and sample analyzing method

 #56
20130195346
2013-08-01

Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device

 #57
20110278451
2011-11-17

Simultaneous electron detection

 #58
20110129066
2011-06-02

Method for quantitative analysis of a material

 #59
20080197282
2008-08-21

Scanning Transmission Charged Particle Beam Device

 #60
20080191134
2008-08-14

Charged particle detector assembly, charged particle beam apparatus and method for generating an image

 #61
20070198955
2007-08-23

Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device

 #62
15185920
2017-08-22

Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material