206613 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Ion implantation characterised by the area treated unpatterned
Fabricating non-uniform diffraction gratings
#2Fabricating non-uniform diffraction gratings
#3Angular scanning using angular energy filter
#4High spatial resolution particle detectors
#5Ion source, ion implantation apparatus, and ion implantation method
#6Partial ion implantation apparatus and method using bundled beam
#7Method of implanting a substrate and an ion implanter for performing the method
#8Method of implanting a substrate and an ion implanter for performing the method
#9System and method for performing SIMOX implants using an ion shower
#10Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays
#11Precision material modification using miniature-column charged particle beam arrays