Charged particle beam drawing apparatus and charged particle beam drawing method

Activation chamber, kit used in treatment device and treatment device, for lowering electron affinity

Method for generating writing data

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same

Nanostructure array diffractive optics for RGB and CMYK color displays

Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus

Beam grid layout

Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle

Apparatus and method for calculating drawing speeds of a charged particle beam

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

Shot data generation method and multi charged particle beam writing method

Compensation of defective beamlets in a charged-particle multi-beam exposure tool

Proximity effect correction in a charged particle lithography system

Ion sources, systems and methods

Method and apparatus for transferring pixel data for electron beam lithography

DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, METHOD OF MANUFACTURING DEVICE