206634 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Etching microareas for repairing masks introducing gas in vicinity of workpiece
DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE BEAM
#2END POINT DETERMINATION BY MEANS OF CONTRAST GAS
#3METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK
#4Substrate processing system, switching timing creation support device,switching timing creation support method, and substrate processing apparatus
#5Method of material deposition
#6Apparatus and method for repairing a photolithographic mask
#7Method and device for permanently repairing defects of absent material of a photolithographic mask
#8Method of material deposition
#9Method of material deposition
#10Repair Apparatus
#11Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam
#12Endpoint detection for photolithography mask repair
#13Apparatus and method for correlating images of a photolithographic mask
#14Repair apparatus
#15Method of welding a frozen aqueous sample to a microprobe
#16Precursor for planar deprocessing of semiconductor devices using a focused ion beam
#17Endpoint detection for photolithography mask repair
#18Method of processing a material-specimen
#19Processing system
#20Method and apparatus for processing a substrate with a focused particle beam
#21Processing system
#22Processing system
#23METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
#24Beam-induced etching
#25Photomask defect correcting method and device
#26Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#27Processing system
#28Method to direct pattern metals on a substrate
#29Processing system
#30System for processing an object
#31System and method for processing an object
#32Apparatus and method for specimen fabrication
#33Material processing system and method
#34FIB milling of copper over organic dielectrics
#35High resolution plasma etch
#36Charged particle-beam processing using a cluster source
#37Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#38Charged beam processing apparatus
#39Manufacturing equipment using ION beam or electron beam
#40Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
#41Use of ion implantation in chemical etching
#42Semiconductor mask correcting device and semiconductor mask correcting method
#43Charged particle beam apparatus
#44Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle
#45Charged particle beam apparatus, defect correcting method, etching method, deposition method, and charge preventing method
#46Focused ion beam processing method
#47Etch selectivity enhancement in electron beam activated chemical etch
#48Structural modification using electron beam activated chemical etch
#49Charged particle beam processing method and charged particle beam apparatus
#50Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method
#51Apparatus and method for specimen fabrication
#52Material processing system and method
#53Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor
#54Beam-induced etching
#55FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS
#56Object-moving method, object-moving apparatus, production process and produced apparatus
#57Ion beam processing method
#58APPARATUS AND METHOD FOR MANIPULATING SAMPLE TEMPERATURE FOR FOCUSED ION BEAM PROCESSING
#59Multiple gas injection system for charged particle beam instruments
#60Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
#61PT COATING INITIATED BY INDIRECT ELECTRON BEAM FOR RESIST CONTACT HOLE METROLOGY
#62Apparatus and method for directing gas towards a specimen
#63Method for characterizing mask defects using image reconstruction from X-ray diffraction patterns
#64Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method
#65Material processing system and method
#66Method for high-resolution processing of thin layers using electron beams
#67FIB milling of copper over organic dielectrics
#68Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface
#69Focused charged particle beam apparatus
#70Magnetic control oscillation-scanning sputter