ClassID:

206635

H01J2237/31745 - page 2 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

Recent Application in this class:
#301
20080224198
2008-09-18

Apparatus for working and observing samples and method of working and observing cross sections

#302
20080203299
2008-08-28

Charged Particle Beam Apparatus

#303
20080191151
2008-08-14

Method and apparatus for specimen fabrication

#304
20080185286
2008-08-07

Method for thinning a sample and sample carrier for performing said method

#305
20080156770
2008-07-03

Method of fabricating grabbing face of sample grabbing portion

#306
20080150557
2008-06-26

Charged particle beam device probe operation

#307
20080135779
2008-06-12

Ion beam system and machining method

#308
20080102224
2008-05-01

Protective layer for charged particle beam processing

#309
20080099695
2008-05-01

Sample preparation system

#310
20080097621
2008-04-24

Graphical automated machine control and metrology

#311
20080088831
2008-04-17

Method for obtaining images from slices of specimen

#312
20080073535
2008-03-27

Planar view sample preparation

#313
20080073521
2008-03-27

Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus

#314
20080067443
2008-03-20

Apparatus for Preparing Cross-Sectional Specimen Using Ion Beam

#315
20080067385
2008-03-20

Method and apparatus for processing a micro sample

#316
20080067374
2008-03-20

Multi-part specimen holder with conductive patterns

#317
20080042059
2008-02-21

Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods

#318
20080029699
2008-02-07

Charge particle beam system, sample processing method, and semiconductor inspection system

#319
20080023641
2008-01-31

Focused ION beam apparatus

#320
20080018460
2008-01-24

Manufacturing equipment using ION beam or electron beam

#321
20070278421
2007-12-06

Sample preparation technique

#322
20070272854
2007-11-29

Sample preparation

#323
20070252092
2007-11-01

Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor

#324
20070187623
2007-08-16

Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element

#325
20070187597
2007-08-16

Focused ion beam system and a method of sample preparation and observation

#326
20070181831
2007-08-09

Method and apparatus for processing a micro sample

#327
20070158591
2007-07-12

Method and apparatus for processing a micro sample

#328
20070158566
2007-07-12

Method for creating observational sample

#329
20070158564
2007-07-12

Method and apparatus for processing a micro sample

#330
20070158560
2007-07-12

Charged particle beam system, semiconductor inspection system, and method of machining sample

#331
20070152151
2007-07-05

Method and sample for radiation microscopy including a particle beam channel formed in the sample source

#332
20070145302
2007-06-28

Method and apparatus for specimen fabrication

#333
20070145301
2007-06-28

Method and apparatus for specimen fabrication

#334
20070145300
2007-06-28

Method and apparatus for specimen fabrication

#335
20070145299
2007-06-28

Focused ion beam apparatus for specimen fabrication

#336
20070089528
2007-04-26

Strain detection for automated nano-manipulation

#337
20070069158
2007-03-29

Charged particle beam apparatus

#338
20070067131
2007-03-22

Defect analyzer

#339
20070057182
2007-03-15

Apparatus and method for inspecting a sample of a specimen by means of an electron beam

#340
20070045560
2007-03-01

Charged particle beam apparatus

#341
20070023701
2007-02-01

Device and method for milling of material using ions

#342
20070023651
2007-02-01

Methods for sample preparation and observation, charged particle apparatus

#343
20060289801
2006-12-28

Focused ion beam system

#344
20060286772
2006-12-21

Method of cross-section milling with focused ion beam (FIB) device

#345
20060284112
2006-12-21

Apparatus and method for specimen fabrication

#346
20060261270
2006-11-23

Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor

#347
20060249692
2006-11-09

Composite charged particle beam apparatus and an irradiation alignment method in it

#348
20060243919
2006-11-02

TEM sample preparation from a circuit layer structure

#349
20060231776
2006-10-19

Method and apparatus for specimen fabrication

#350
20060231590
2006-10-19

Glow discharge drilling apparatus and glow discharge drilling method

#351
20060219919
2006-10-05

TEM sample holder and method of forming same

#352
20060198494
2006-09-07

Three-dimensional structure analyzing system

#353
20060197017
2006-09-07

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

#354
20060192118
2006-08-31

Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus

#355
20060192116
2006-08-31

Charged particle beam device probe operation

#356
20060192099
2006-08-31

Method and apparatus for specimen fabrication

#357
20060186336
2006-08-24

Repetitive circumferential milling for sample preparation

#358
20060157341
2006-07-20

Method of making lamina specimen

#359
20060139049
2006-06-29

Planar view TEM sample preparation from circuit layer structures

#360
20060113496
2006-06-01

Method and equipment for specimen preparation

#361
20060113478
2006-06-01

Kit for preparing a tem sample holder

#362
20060113477
2006-06-01

Apparatus for preparing a TEM sample holder

#363
20060113476
2006-06-01

Method of preparing a sample for examination in a TEM

#364
20060113475
2006-06-01

TEM sample holder

#365
20060097166
2006-05-11

Charged particle beam apparatus and sample manufacturing method

#366
20060091325
2006-05-04

Method and apparatus for the automated process of in-situ lift-out

#367
20060091302
2006-05-04

Apparatus and method of detecting probe tip contact with a surface

#368
20060065854
2006-03-30

Ion beam system and machining method

#369
20060022148
2006-02-02

Device and method for milling of material using ions

#370
20060022135
2006-02-02

Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

#371
20060017016
2006-01-26

Method for the removal of a microscopic sample from a substrate

#372
20060016987
2006-01-26

Method and apparatus for rapid sample preparation in a focused ion beam microscope

#373
20060011868
2006-01-19

Method and apparatus for sample formation and microanalysis in a vacuum chamber

#374
20060011867
2006-01-19

Apparatus for sample formation and microanalysis in a vacuum chamber

#375
20060000973
2006-01-05

Method for the removal of a microscopic sample from a substrate

#376
20050247886
2005-11-10

Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same

#377
20050236587
2005-10-27

Ion beam device and ion beam processing method, and holder member

#378
20050221229
2005-10-06

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

#379
20050211927
2005-09-29

Method and apparatus for processing a micro sample

#380
20050199828
2005-09-15

Method and apparatus for processing a micro sample

#381
20050188309
2005-08-25

Graphical automated machine control and metrology

#382
20050184236
2005-08-25

Probe current imaging

#383
20050184028
2005-08-25

Probe tip processing

#384
20050178980
2005-08-18

Method, system and device for microscopic examination employing fib-prepared sample grasping element

#385
20050118065
2005-06-02

Apparatus and method for preparing samples

#386
20050087697
2005-04-28

Inspection by a transmission electron microscope of a sample

#387
20050066899
2005-03-31

Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor

#388
20050054029
2005-03-10

Method and apparatus for specimen fabrication

#389
20050006600
2005-01-13

Method and apparatus for specimen fabrication

#390
20050001164
2005-01-06

Method and apparatus for processing a micro sample

#391
17727739
2022-11-01

Three-dimensional (3D) imaging system and method for nanostructure

#392
16052788
2019-12-31

Method of producing lift out specimens for teaching, practice, and training