206635 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
METHOD AND APPARATUS FOR CHARGE COMPENSATION DURING 3D TOMOGRAPHY
#2METHOD FOR LOCALIZING A REGION OF INTEREST IN A SAMPLE AND MICROMACHINING THE SAMPLE USING A CHARGED PARTICLE BEAM
#3STANDARD SAMPLE FOR USE IN TRANSMISSION ELECTRON MICROSCOPE, METHOD OF PREPARING THE SAME, METHOD OF ADJUSTING TRANSMISSION ELECTRON MICROSCOPE, AND METHOD OF ANALYZING OBSERVATION IMAGE OBTAINED WITH TRANSMISSION ELECTRON MICROSCOPE
#4LAMELLA PREPARATION FROM THICK HPF SAMPLES
#5METHOD FOR PREPARING TEM SAMPLE
#63D FIDUCIAL FOR PRECISION 3D NAND CHANNEL TILT/SHIFT ANALYSIS
#7Gas Phase Sample Preparation for Cryo-Electron Microscopy
#8ION MILLING DEVICE
#9DELAYERING APPARATUS AND METHODS
#10NANOSCALE FAILURE ANALYSIS METHOD
#11FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
#12METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INVESTIGATION DEVICE TO PERFORM SUCH METHOD
#13DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE THINNING
#14Integrated Circuit with FIB-Ready Structures
#15Systems and methods for performing sample lift-out for highly reactive materials
#16METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY
#17METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY
#18METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
#19METHOD AND SYSTEM FOR PREPARING A SPECIMEN
#20Application Management For Charged Particle Microscope Devices
#21Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a Broad Ion Beam (BIB) system
#22Method for cross-section sample preparation
#23DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
#24ENDPOINTING WITH DETERMINATION OF REMAINING DISTANCE
#25METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED ION BEAM
#26SAMPLE PREPARATION METHOD AND APPARATUS
#27Gas phase sample preparation for cryo-electron microscopy
#28Systems and methods for performing sample lift-out for highly reactive materials
#29Method for measuring a sample and microscope implementing the method
#30WORKSTATION, PREPARATION STATION AND METHOD FOR MANIPULATING AN ELECTRON MICROSCOPY GRID ASSEMBLY
#31Analysis device, analysis method, and storage medium
#32Specimen Machining Device and Specimen Machining Method
#33Ion milling device
#34Method for producing lamella, analysis system and method for analyzing sample
#35Method for cross-section sample preparation
#363D fiducial for precision 3D NAND channel tilt/shift analysis
#37Method for preparing a TEM sample
#38Gas phase sample preparation for cryo-electron microscopy
#39Ion milling apparatus and sample holder
#40Method of preparing and analyzing thin films
#41Imaging method and imaging system
#42Composite charged particle beam apparatus
#43Method of material deposition
#44Focused ion beam apparatus
#45Charged particle beam apparatus
#46Method, device and system for the treatment of biological cryogenic samples by plasma focused ion beams
#47A Device for Extracting and Placing a Lamella
#48Diagonal compound mill
#49Method of preparing thin film sample piece and charged particle beam apparatus
#50Method for cross-section sample preparation
#51Methods and compositions for micro-electron diffraction
#52Gas phase sample preparation for cryo-electron microscopy
#53Face-on, gas-assisted etching for plan-view lamellae preparation
#54Method of sample preparation using dual ion beam trenching
#55Dose-based end-pointing for low-kV FIB milling in TEM sample preparation
#56Automatic processing device
#57DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
#58Tomography-assisted TEM prep with requested intervention automation workflow
#59Method for producing a TEM sample
#60Methods for acquiring planar view stem images of device structures
#61Apparatus, method, and program for processing and observing cross section, and method of measuring shape
#62Automated TEM sample preparation
#63Composite charged particle beam apparatus
#64Endpointing for focused ion beam processing
#65Cross section processing observation method and charged particle beam apparatus
#66Tomography-assisted TEM prep with requested intervention automation workflow
#67Specimen preparation and inspection in a dual-beam charged particle microscope
#68Depth-controllable ion milling
#69Device with ion column and scanning electron microscope
#70Three-dimensional image reconstruction method
#71System and method for performing nano beam diffraction analysis
#72Sample holder, ion milling apparatus, sample processing method, sample observing method, and sample processing and observing method
#73Method for the in situ preparation of microscopic specimens
#74Probe with solid beveled tip and method for using same for specimen extraction
#75Device processing method and device processing apparatus
#76Sample holder system and sample observation apparatus
#77Face-on, gas-assisted etching for plan-view lamellae preparation
#78Ion milling apparatus and sample holder
#79Fiducial design for tilted or glancing mill operations with a charged particle beam
#80Method of material deposition
#81Sample holder, member mounting device, and charged particle beam apparatus
#82GLANCING ANGLE MILL
#83Method and apparatus for transmission electron microscopy
#84Enhanced FIB-SEM systems for large-volume 3D imaging
#85Innovative source assembly for ion beam production
#86Charged particle beam apparatus
#87CHARGED PARTICLE BEAM APPARATUS
#88Methods, apparatuses, systems and software for treatment of a specimen by ion-milling
#89Tomography sample preparation systems and methods with improved speed, automation, and reliability
#90Charged particle instruments
#91Apparatus with two or more particle beams for processing a specimen
#92Sample holder and focused ion beam apparatus
#93Focused ion beam apparatus
#94Method for structuring an object and associated particle beam system
#95Automated TEM sample preparation
#96High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#97Charged particle beam-induced etching
#98Charged particle beam apparatus
#99Method of material deposition
#100Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics
#101CAD-assisted TEM prep recipe creation
#102Method of preparing a plan-view transmission electron microscope sample used in an integrated circuit analysis
#103Method for preparing cross-sections by ion beam milling
#104Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics
#105Method of manipulating a sample in an evacuated chamber of a charged particle apparatus
#106Method for generating image data relating to an object and particle beam device for carrying out this method
#107Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
#108Sample carrying device and vacuum apparatus
#109Differential imaging with pattern recognition for process automation of cross sectioning applications
#110Method of modifying a sample surface layer from a microscopic sample
#111Method for processing and/or for observing an object, and particle beam device for carrying out the method
#112Method for S/TEM sample analysis
#113Method of specimen processing in an apparatus with two or more particle beams and apparatus for this processing
#114Automated TEM sample preparation
#115Endpointing for focused ion beam processing
#116Chicane blanker assemblies for charged particle beam systems and methods of using the same
#117Composite charged particle beam apparatus
#118Sample stack structure and method for preparing the same
#119Charged particle radiation device and specimen preparation method using said device
#120Charged particle beam apparatus
#121Method of acquiring EBSP patterns
#122Apparatus for preparing a sample for microscopy
#123TEM sample preparation
#124Method and System of Creating a Symmetrical FIB Deposition
#125Fiducial design for tilted or glancing mill operations with a charged particle beam
#126Ion implantation to alter etch rate
#127TEM sample preparation
#128Method for creating S/TEM sample and sample structure
#129Method and apparatus for sample extraction and handling
#130High capacity TEM grid
#131Method and system for reducing curtaining in charged particle beam sample preparation
#132Cross-section processing and observation method and cross-section processing and observation apparatus
#133Charged particle beam device and sample preparation method
#134Methods, apparatuses, systems and software for treatment of a specimen by ion-milling
#135Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
#136High aspect ratio structure analysis
#137Bulk deposition for tilted mill protection
#138Scanning electron microscope
#139METHOD FOR PREPARING AND ANALYZING AN OBJECT AS WELL AS PARTICLE BEAM DEVICE FOR PERFORMING THE METHOD
#140Method for S/TEM sample analysis
#141Differential imaging with pattern recognition for process automation of cross sectioning applications
#142Cross section processing method and cross section processing apparatus
#143Integrated lamellae extraction station
#144Method for preparing thin samples for TEM imaging
#145Detaching probe from TEM sample during sample preparation
#146TEM sample preparation
#147Method for processing and/or for observing an object, and particle beam device for carrying out the method
#148Method for manufacturing a TEM-lamella and assembly having a TEM-lamella protective structure
#149Automated slice milling for viewing a feature
#150Ion milling device
#151Method of welding a frozen aqueous sample to a microprobe
#152Ion beam sample preparation apparatus and methods
#153Charged-particle microscope providing depth-resolved imagery
#154Low energy ion milling or deposition
#155Method and arrangement for manufacturing a sample for microstructural materials diagnostics and corresponding sample
#156Focused ion beam apparatus and method of working sample using the same
#157Method of depositing protective structures
#158Method for preparing samples for imaging
#159Cross-section processing and observation method and cross-section processing and observation apparatus
#160Method for creating S/TEM sample and sample structure
#161Particle beam system and method of processing a TEM-sample
#162Charged particle beam device and sample production method
#163Specimen holder for holding a semiconductor device during a sample preparation procedure carried out using first and second sample preparation apparatuses
#164Composite charged particle beam apparatus and thin sample processing method
#165Dose-based end-pointing for low-kV FIB milling TEM sample preparation
#166METHOD FOR ADJUSTING A LAYOUT OF AN INTEGRATED CIRCUIT
#167Ion beam sample preparation apparatus and methods
#168Method for S/TEM sample analysis
#169Method for ex-situ lift-out specimen preparation
#170Ion beam device and machining method
#171Lamella creation method and device using fixed-angle beam and rotating sample stage
#172Combined laser processing system and focused ion beam system
#173Preparation of lamellae for TEM viewing
#174Sample preparation method
#175Cross-section processing and observation method and cross-section processing and observation apparatus
#176Sample observation method, sample preparation method, and charged particle beam apparatus
#177High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#178Ion milling device and ion milling processing method
#179Method and apparatus for ex-situ lift-out specimen preparation
#180Sample preparation method and apparatus
#181TEM sample preparation method
#182Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
#183Glancing angle mill
#184Method for preparing lamella
#185Method and apparatus for in situ preparation of serial planar surfaces for microscopy
#186Method and apparatus for sample extraction and handling
#187Methods for preparing thin samples for TEM imaging
#188Charged particle beam device and sample production method
#189Composite charged particle beam apparatus
#190METHOD OF CHARACTERIZING A MATERIAL USING THREE DIMENSIONAL RECONSTRUCTION OF SPATIALLY REFERENCED CHARACTERISTICS AND USE OF SUCH INFORMATION
#191Composite charged particle beam apparatus
#192Method for processing samples held by a nanomanipulator
#193Devices and methods for cryo lift-out with in situ probe
#194Apparatus and method for probe shape processing by ion beam
#195Composite charged-particle-beam apparatus
#196REDEPOSITION TECHNIQUE FOR MEMBRANE ATTACHMENT
#197Charged particle beam apparatus, and sample processing and observation method
#198Particle beam device and method for use in a particle beam device
#199Sample Holder with Optical Features for Holding a Sample in an Analytical Device for Research Purposes
#200Charged particle beam device and sample observation method
#201METHOD AND APPARATUS FOR PROVIDING BEAMS OF NANODROPLETS FOR HIGH SPUTTERING RATE OF INERT MATERIALS
#202Method and apparatus for processing a micro sample
#203Focused ion beam device and focused ion beam processing method
#204Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
#205Sample preparation
#206TEM-lamella, process for its manufacture, and apparatus for executing the process
#207Method of Depositing Protective Structures
#208Measurement and endpointing of sample thickness
#209Method for creating S/TEM sample and sample structure
#210Sample holder with optical features
#211Method and apparatus for rapid preparation of multiple specimens for transmission electron microscopy
#212Sample holder, method for use of the sample holder, and charged particle device
#213Protective layer for charged particle beam processing
#214Method and system for milling and imaging an object
#215Method and apparatus for specimen fabrication
#216Cross-section systems and methods
#217METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES
#218Composite charged particle beams apparatus
#219Charged particle beam apparatus and sample processing method
#220Charged particle beam device and method for correcting position with respect to charged particle beam
#221METHOD AND APPARATUS FOR PROVIDING BEAMS OF NANODROPLETS FOR HIGH SPUTTERING RATE OF INERT MATERIALS
#222Defect analyzer
#223Automated slice milling for viewing a feature
#224Sample processing and observing method
#225Composite charged particle beam apparatus and sample processing and observing method
#226Method for obtaining images from slices of specimen
#227APPARATUS FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT
#228ION Beam System and Machining Method
#229Method and apparatus for processing a microsample
#230Analysis method for semiconductor device
#231Method and apparatus for specimen fabrication
#232Method and apparatus for specimen fabrication
#233Method for stem sample inspection in a charged particle beam instrument
#234Method for stem sample inspection in a charged particle beam instrument
#235Method for preparing transmission electron microscope sample
#236Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument
#237VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS
#238Probe and method for obtaining three-dimensional compositional maps of a biological sample
#239Method for S/TEM sample analysis
#240Beam quality in FIB systems
#241Method for creating S/TEM sample and sample structure
#242Method and apparatus for sample extraction and handling
#243Method for creating S/tem sample and sample structure
#244Composite focused ion beam device, process observation method using the same, and processing method
#245Method of depositing protective structures
#246Forming an image while milling a work piece
#247Micro cross-section processing method
#248Cross section processing method and method of manufacturing cross section observation sample
#249Composite focused ion beam device, and processing observation method and processing method using the same
#250Method of processing objects by focused ion beam system and carrier used therewith
#251Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing
#252Graphical automated machine control and metrology
#253ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS
#254Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample
#255Measurement and endpointing of sample thickness
#256Transmission electron microscope sample holder with optical features
#257Method and apparatus for producing samples for transmission electron microscopy
#258Preparation method for an electron tomography sample with embedded markers and a method for reconstructing a three-dimensional image
#259METHOD FOR CLEANING A HIGH RESOLUTION SCANNING ELECTRON MICROSCOPE SAMPLE WITH A LOW POWER ION BEAM
#260Device and method for analyzing a sample
#261Method of machining a work piece with a focused particle beam
#262Method to direct pattern metals on a substrate
#263GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT
#264Method for the production of a sample for electron microscopy
#265Section processing method and its apparatus
#266Integrated Circuit Cooling Apparatus for Focused Beam Processes
#267Method for preparing specimens for atom probe analysis and specimen assemblies made thereby
#268Particle optical arrangement
#269Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope
#270Method of forming TEM sample holder
#271Focused ion beam apparatus
#272Slice and view with decoration
#273Defect analyzer
#274Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
#275Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same
#276System and method for focused ion beam data analysis
#277Methods for sample preparation and observation, charged particle apparatus
#278Method for sample preparation
#279Apparatus and method for specimen fabrication
#280Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope
#281Sample preparing device and sample posture shifting method
#282Method and system for generating and reviewing a thin sample
#283Method and apparatus for transfer of samples in a controlled environment
#284Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
#285Charged particle beam apparatus
#286CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD
#287Particle beam device and method for use in a particle beam device
#288Method and apparatus for specimen fabrication
#289Method for attaching a sample to a manipulator by melting and then freezing part of said sample
#290Focused ion beam processing system and method
#291Composite charged-particle beam system
#292METHOD AND APPARATUS FOR SPECIMEN FABRICATION
#293In-situ STEM sample preparation
#294Method and apparatus for specimen fabrication
#295Charged particle beam processing apparatus
#296Heating stage for a micro-sample
#297Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis
#298Charged particle beam apparatus and method for operating a charged particle beam apparatus
#299Method for STEM sample inspection in a charged particle beam instrument
#300Charged particle system