206641 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Lithography using particular beams or near-field effects, e.g. STM-like techniques using ion beams
ION BEAM LITHOGRAPHY AND NANOENGINEERING
#2Multi-Beam Pattern Definition Device
#3Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system
#4Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
#5Charged-particle beam exposure method and charged-particle beam correction method
#6Ion sources, systems and methods
#7Ion sources, systems and methods
#8Ion sources, systems and methods
#9Ion sources, systems and methods
#10Installation and method of nanofabrication
#11ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME
#12Ion sources, systems and methods
#13Ion sources, systems and methods
#14Ion sources, systems and methods
#15Ion sources, systems and methods
#16Ion sources, systems and methods
#17Ion sources, systems and methods
#18Ion sources, systems and methods
#19Ion sources, systems and methods
#20Ion sources, systems and methods
#21Ion sources, systems and methods
#22Ion sources, systems and methods
#23Ion sources, systems and methods
#24Ion sources, systems and methods
#25Ion sources, systems and methods
#26Ion sources, systems and methods
#27Micromachining process, system and product
#28Double layer patterning and technique for milling patterns for a servo recording head
#29Ion printer