206643 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Lithography using particular beams or near-field effects, e.g. STM-like techniques using near-field effects, e.g. STM
Depassivation lithography by scanning tunneling microscopy
#2Method and apparatus for an imaging system
#3Method and apparatus for an electromagnetic emission based imaging system
#4Method and apparatus for a high resolution imaging system
#5Methods, devices, and systems for forming atomically precise structures
#6Multi-nanometer-projection apparatus for lithography, oxidation, inspection, and measurement
#7Device and method for patterning structures on a substrate
#8Area selective deposition templated by hydrogen and halogen resists