207020 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Forming layers; Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
Photosensitive polyimide compositions
#602Composition for forming passivation film, including resin having carbon-carbon multiple bond
#603Method of manufacturing silicon nanowire array
#604Wafer coating system and method of manufacturing chip package
#605Additives for orientation control of block copolymers
#606Semiconductor element, method for fabricating the same, and semiconductor device including the same
#607Method for coating a substrate
#608Subtractive methods for creating dielectric isolation structures within open features
#609Conductive line system and process
#610Methods of forming different sized patterns
#611Composition for pattern formation, pattern-forming method, and block copolymer
#612Dielectric filling materials with ionic compounds
#613Methods of forming nanostructures using self-assembled nucleic acids, and nanostructures thereof
#614Pattern forming method and heating apparatus
#615Polyarylene polymers
#616Semiconductor memory device and method for manufacturing the same
#617Pattern forming method
#618Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor
#619Pattern formation method
#620Priming material for substrate coating
#621Method of fabricating organic electroluminescent device
#622Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition
#623Technique to deposit sidewall passivation for high aspect ratio cylinder etch
#624SEMICONDUCTOR TEST PAD WITH STACKED THIN METAL SHEETS AND METHOD FOR MANUFACTURING THE SAME
#625Lithographic resist with floating protectant
#626Copolymer formulation for directed self-assembly, methods of manufacture thereof and articles comprising the same
#627Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
#628Interconnects based on subtractive etching of silver
#629Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same
#630Methods for producing a thin film ferroelectric device using a two-step temperature process on an organic polymeric ferroelectric precursor material stacked between two conductive materials
#631Methods of forming hardmask material film
#632Compounders for enhancing generation of chemical species
#633Polymer and composition including same, and adhesive composition
#634Fabrication of IGZO oxide TFT on high CTE, low retardation polymer films for LDC-TFT applications
#635Methods and systems for improved uniformity of SiGe thickness
#636Curable composition for optical imprinting and pattern forming method
#637Method for forming semiconductor device structure with gate
#638High boiling temperature solvent additives for semiconductor processing
#639Methods of forming electronic devices including filling porous features with a polymer
#640Non-lithographically patterned directed self assembly alignment promotion layers
#641Interconnect having air gaps and polymer wrapped conductive lines
#642Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)
#643Resin composition and gate insulating film
#644Azide-based crosslinking agents
#645Reliability improvement of polymer-based capacitors by moisture barrier
#646Phase changing on-chip thermal heat sink
#647Method of producing layer structure, layer structure, and method of forming patterns
#648Semiconductor structure including a die seal leakage detection material, method for the formation thereof and method including a test of a semiconductor structure
#649Method for forming multi-layer film and patterning process
#650Compound, photocurable composition, and methods for producing patterned film, optical component, circuit board, electronic component by using the photocurable composition, and cured product
#651Method for collapse-free drying of high aspect ratio structures
#652Etching process
#653Etching method for forming grooves in Si-substrate and fin field-effect transistor
#654Polymer, organic layer composition, organic layer, and method of forming patterns
#655Method of fabricating organic electroluminescent device
#656Low-Temperature Passivation of Ferroelectric Integrated Circuits for Enhanced Polarization Performance
#657Passivation structure and method of making the same
#658Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
#659ELECTROSTATIC CHUCK MECHANISM, SUBSTRATE PROCESSING METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
#660METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#661Methods of fabricating semiconductor devices with flattened hardmask layers
#662Synthesis of silicon containing materials using liquid hydrosilane compositions through direct injection
#663Recycle photochemical to reduce cost of material and environmental impact
#664Methods of forming holes using mask pattern structures
#665Method for producing semiconductor apparatus substrate
#666Pattern formation method
#667Alignment method of alignment film
#668Process for fabricating silicon nanostructures
#669Phase changing on-chip thermal heat sink
#670Method for manufacturing composite body and composition
#671Block patterning process for post fin
#672Methods of manufacturing semiconductor device
#673METHOD AND COMPOSITION FOR PROVIDING PORE SEALING LAYER ON POROUS LOW DIELECTRIC CONSTANT FILMS
#674Semiconductor Device Manufacturing Method
#675Pattern forming method
#676Self-assembled nanostructures including metal oxides and semiconductor structures comprised thereof
#677Adhesion promoter
#678Oxide thin film transistor, array substrate, methods of manufacturing the same and display device
#679Method of forming a semiconductor device including a pitch multiplication
#680Doping of a substrate via a dopant containing polymer film
#681Methods for fabricating integrated circuits using directed self-assembly chemoepitaxy
#682Methods for fabricating integrated circuits using directed self-assembly
#683Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process
#684Substrate manufacturing method and substrate manufacturing apparatus
#685Interconnect having air gaps and polymer wrapped conductive lines
#686Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process
#687Method of making a semiconductor device using multiple layer sets
#688Integration of absorption based heating bake methods into a photolithography track system
#689Composition, method for producing patterned substrate, film and forming method thereof, and compound
#690Aqueous detergent soluble coating and adhesive and methods of temporary bonding for manufacturing
#691Photoresist and method of manufacture
#692DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
#693COMPOUNDERS FOR ENHANCING GENERATION OF CHEMICAL SPECIES
#694Aromatic resins for underlayers
#695Photosensitive gas generating agent and photocurable composition
#696Conductive line system and process
#697Substrate
#698Integrated circuit assembly with cushion polymer layer
#699Film forming method, computer storage medium, and film forming system
#700GAAS-BASED DETECTOR HIGHLY STABLE IN AQUEOUS SOLUTIONS
#701Polyimide precursor, photosensitive resin composition containing said polyimide precursor, and cured-pattern-film manufacturing method and semiconductor device using said photosensitive resin composition
#702Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film
#703LOW MODULUS NEGATIVE TONE, AQUEOUS DEVELOPABLE PHOTORESIST
#704Micro electro mechanical system, semiconductor device, and manufacturing method thereof
#705Methods and structures for back end of line integration
#706Sublithographic Kelvin structure patterned with DSA
#707FORMING INTERCONNECT STRUCTURE WITH POLYMERIC LAYER AND RESULTING DEVICE
#708Photosensitive resin composition, method for producing patterned cured film, semiconductor element and electronic device
#709Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
#710Photosensitive resin composition, photosensitive film, and method for forming resist pattern
#711Resist underlayer film-forming composition comprising carbonyl-containing polyhydroxy aromatic ring novolac resin
#712Method for polishing a polymer surface
#713Compound semiconductor device and method of manufacturing the same
#714APPARATUS AND METHODS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF POLYMER COATINGS
#715Robust gate spacer for semiconductor devices
#716Silicon dot formation by self-assembly method and selective silicon growth for flash memory
#717Directed self-assembly pattern formation methods and compositions
#718Blue quantum dot composite particle and method for preparing the same, photoelectric element, and photoelectric device
#719Integrated circuit assembly with cushion polymer layer
#720Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition
#721Dry-removable protective coatings
#722Composition for film formation, resist underlayer film, and forming method of resist underlayer film, and pattern-forming method
#723Pattern forming method
#724SEMICONDUCTOR DEVICE
#725Fabricating VTFT with polymer core
#726Semiconductor structure and manufacturing method thereof
#727Semiconductor structures including liners comprising alucone and related methods
#728Method for creating contacts in semiconductor substrates
#729Phase changing on-chip thermal heat sink
#730Method for directed self-assembly (DSA) of a block copolymer (BCP) using a blend of a BCP with functional homopolymers
#731Method for structuring a layered structure from two semiconductor layers, and micromechanical component
#732METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#733Mark formation method and device manufacturing method
#734Method of FinFET formation
#735Methods of fabricating a pattern using the block co-polymer materials
#736Resin composition for forming protective film, protective film, pattern forming method, method for manufacturing electronic device, and electronic device
#737Method for passivating surfaces, functionalizing inert surfaces, layers and devices including same
#738Semiconductor device and fabrication method thereof
#739Method and structure for gap filling improvement
#740Semiconductor integrated circuit with nano gap
#741Interconnect structures comprising flexible buffer layers
#742Ion implantation methods
#743Method for directed self-assembly (DSA) of block copolymers
#744Photoresist composition and method of manufacturing a thin film transistor substrate
#745Semiconductor integrated circuit
#746NONVOLATILE MEMORY DEVICE USING SEMICONDUCTOR NANOCRYSTALS AND METHOD OF FORMING SAME
#747Mask passivation using plasma
#748Method for microwave processing of photosensitive polyimides
#749Method for preparing a semiconducting layer
#750Biometric Image Sensor Packaging and Mounting
#751Semiconductor device, method for manufacturing the same, and rinsing liquid
#752Hardmask composition and method of forming patterns using the hardmask composition
#753HARDMASK COMPOSITION, METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE INCLUDING THE PATTERNS
#754Gap filling materials and methods
#755Method of using a vaporizing spray system to perform a trimming process
#756Photocurable composition and method of manufacturing film using the composition
#757NON-VOLATILE MEMORY DEVICE INCLUDING FLEXIBLE CHARGE TRAPPING LAYER AND METHOD FOR FABRICATING THE SAME
#758Non-volatile memory device including charge trapping layer and method for fabricating the same
#759NON-VOLATILE MEMORY DEVICE INCLUDING FLEXIBLE NANO FLOATING GATE AND METHOD FOR FABRICATING THE SAME
#760Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
#761Field effect transistor and method of fabricating the same
#762Fin field effect transistor and method for forming the same
#763Polymer on graphene
#764Polymer compound, resin composition for photoresists, and method for producing semiconductor
#765Dielectric coating of the edge of a solar cell
#766Method for forming a semiconductor device having insulating parts or layers formed via anodic oxidation
#767UV-assisted photochemical vapor deposition for damaged low K films pore sealing
#768Liquid crystal display and method of manufacturing the same
#769SEMICONDUCTOR CHIP AND METHOD OF FORMING THE SAME
#770Semiconductor patterning
#771Method for texturing a substrate having a large surface area
#772GAS SUPPLY DEVICE, FILM FORMING APPARATUS, GAS SUPPLY METHOD, AND STORAGE MEDIUM
#773METHODS OF SELECTIVELY FORMING A MATERIAL USING A PARYLENE COATING AND RELATED SEMICONDUCTOR STRUCTURES
#774POLYMERIC MATERIALS IN SELF-ASSEMBLED ARRAYS AND SEMICONDUCTOR STRUCTURES AND METHODS COMPRISING SUCH POLYMERIC MATERIALS
#775Method of patterning
#776Method of producing solar cell
#777Inkjet printing in a peripheral region of a substrate
#778Semiconductor device and method of producing semiconductor device
#779Method for chemically passivating a surface of a product made of a III-V semiconductor material and the product obtained by such a method
#780Self-healing crack stop structure
#781Underlayer composition for promoting self assembly and method of making and using
#782Layer deposition on III-V semiconductors
#783Method for depositing a film and film deposition apparatus
#784Two step method of rapid curing a semiconductor polymer layer
#785Film formation method and film formation apparatus
#786UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
#787Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
#788Self-assembled monolayer for pattern formation
#789Photoresist and method of formation and use
#790Passivation structure and method of making the same
#791Wafer surface conditioning for stability in fab environment
#792Silicon dot formation by self-assembly method and selective silicon growth for flash memory
#793METHOD OF PREVENTING VOLTAGE BREAKDOWN AT A SURFACE OF A SEMICONDUCTOR SUBSTRATE OF A SUPERJUNCTION SEMICONDUCTOR DEVICE
#794PLASMA POLYMERIZED THIN FILM HAVING HIGH HARDNESS AND LOW DIELECTRIC CONSTANT AND MANUFACTURING METHOD THEREOF
#795Nonvolatile semiconductor memory device and method for manufacturing same
#796III-N device structures and methods
#797Array substrate for liquid crystal display and method for manufacturing the same
#798POLYIMIDES AS DIELECTRICS
#799Photosensitive resin composition, method for manufacturing patterned cured film, and electronic component
#800Semiconductor structures and methods of manufacture
#801DIRECTED SELF-ASSEMBLY (DSA) FORMULATIONS USED TO FORM DSA-BASED LITHOGRAPHY FILMS
#802COMPOSITION FOR FORMING PASSIVATION FILM, INCLUDING RESIN HAVING CARBON-CARBON MULTIPLE BOND
#803Micro electro mechanical system, semiconductor device, and manufacturing method thereof
#804Sealing composition for semiconductor, semiconductor device and method of producing the same, and polymer and method of producing the same
#805Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
#806SILICON-RICH ANTIREFLECTIVE COATING MATERIALS AND METHOD OF MAKING SAME
#807Method of manufacturing a thin film having a high tolerance to etching and non-transitory computer-readable recording medium
#808Enhanced productivity for an etch system through polymer management
#809Unlocking layer and method
#810Light emitting device
#811Material for forming passivation film for semiconductor substrate, passivation film for semiconductor substrate and method of producing the same, and photovoltaic cell element and method of producing the same
#812Carbosilane polymer compositions for anti-reflective coatings
#813Pattern forming method
#814Methods of patterning block copolymer layers
#815Ion implantation methods
#816Fabrication and passivation of silicon surfaces
#817Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns
#818Method for fabrication of crack-free ceramic dielectric films
#819Method of fabricating organic electroluminescent device
#820Adhesion promoter
#821ADHESION PROMOTER
#822Dielectric composition for thin-film transistors
#823Graphene device including a PVA layer or formed using a PVA layer
#824III-N device structures and methods
#825Interconnect structures comprising flexible buffer layers
#826Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
#827Inkjet printable etch resist
#828Semiconductor device and fabrication method thereof
#829Laminate, production method for same, and method of creating device structure using laminate
#830Method of manufacturing semiconductor device
#831Method of manufacturing a semiconductor device including a dielectric structure
#832Sidewall protection of low-K material during etching and ashing
#833Method of lithography process with an under isolation material layer
#834Semiconductor device and method of manufacturing the same
#835Film forming method
#836Method for lower thermal budget multiple cures in semiconductor packaging
#837Method for Improving Polyimide Non-Adherence to Substrate and Polyimide Solution
#838Semiconductor structures and methods of manufacture
#839Polymer etchant and method of using same
#840THIN FILM TRANSISTOR SUBSTRATE
#841Ultraviolet-curing resin material for pattern transfer and magnetic recording medium manufacturing method using the same
#842METHODS OF POLYMERS DEPOSITION FOR FORMING REDUCED CRITICAL DIMENSIONS
#843Self-leveling planarization materials for microelectronic topography
#844Method for fabrication of crack-free ceramic dielectric films
#845FILM DEPOSITION APPARATUS
#846ORGANOMETALLIC COMPOUNDS
#847ORGANOMETALLIC COMPOUNDS
#848Selective deposition of polymer films on bare silicon instead of oxide surface
#849Material for forming passivation film for semiconductor substrate, passivation film for semiconductor substrate and method of producing the same, and photovoltaic cell element and method of producing the same
#850Nanostructured silicon for battery anodes
#851Dielectric nanocomposites and methods of making the same
#852Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same
#853CLEANING METHOD AND FILM DEPOSITING METHOD
#854Method for processing a semiconductor wafer or die, and particle deposition device
#855Thermally imageable dielectric layers, thermal transfer donors and receivers
#856Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
#857STABILIZATION OF BICYCLOHEPTADIENE
#858Formulations for voltage switchable dielectric materials having a stepped voltage response and methods for making the same
#859III-N device structures and methods
#860Electronic device manufacture using low-k dielectric materials
#861Methods for manufacturing superjunction semiconductor device having a dielectric termination
#862Surface coating method, semiconductor device, and circuit board package
#863Pattern forming method and resist underlayer film-forming composition
#864Film forming apparatus
#865Hardmask composition including aromatic ring-containing compound, method of forming patterns, and semiconductor integrated circuit device including the patterns
#866COMPOSITION FOR FILM FORMATION, INSULATING FILM AND SEMICONDUCTOR DEVICE
#867Method for coating dielectric composition for fabricating thin-film transistors
#868Graphoepitaxial self-assembly of arrays of downward facing half-cylinders
#869Method of depositing dielectric films using microwave plasma
#870Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device
#871Nonvolatile semiconductor memory device and method for manufacturing same
#872Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
#873RESIN COMPOSITION FOR INSULATING LAYER
#874Methods of selectively forming a material using parylene coating
#875Method for manufacturing porous structure and method for forming pattern
#876Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches
#877Method for manufacturing porous structure and method for forming pattern
#878Method for manufacturing porous structure and method for forming pattern
#879Electrodeposition of dielectric coatings on semiconductive substrates
#880INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING LAYER, AND METHOD OF FABRICATING THE ORGANIC THIN FILM TRANSISTOR
#881DIE PACKAGE AND A METHOD FOR MANUFACTURING THE DIE PACKAGE
#882BORAZINE-BASED RESIN, PROCESS FOR ITS PRODUCTION, BORAZINE-BASED RESIN COMPOSITION, INSULATING FILM AND METHOD FOR ITS FORMATION
#883Patternable dielectric film structure with improved lithography and method of fabricating same
#884Insulation material for integrated circuits and use of said integrated circuits
#885Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
#886Methods of forming a passivation layer
#887Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
#888NITROGEN DOPED AMORPHOUS CARBON HARDMASK
#889Forming agent for gate insulating film of thin film transistor
#890SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
#891Method of forming and patterning conformal insulation layer in vias and etched structures
#892Nonvolative memory device using semiconductor nanocrystals and method of forming same
#893POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING AND METHOD FOR PRODUCING THROUGH ELECTRODE USING THE SAME
#894Dielectric materials and methods of preparation and use thereof
#895Organic insulating material, varnish for resin film using the same, resin film and semiconductor device
#896Polymerized film forming method and polymerized film forming apparatus
#897Nonvolatile memory device using semiconductor nanocrystals and method of forming same
#898Transistor using derivative polymethyl-methacrylate thin film as gate insulator and passivation layer, and fabrication method thereof
#899Ink composition for forming insulating film and insulating film formed from the ink composition
#900TREATED SUBSTRATE HAVING HYDROPHILIC REGION AND WATER REPELLENT REGION, AND PROCESS FOR PRODUCING IT