Method for crystallizing silicon using a ramp shaped laser beam

Thin film transistor and method of manufacturing the same

Semiconductor device used as electro-optical device having channel formation region containing first element, and source or drain region containing second element

Method of enhancing laser crystallization for polycrystalline silicon fabrication

Manufacturing method for crystalline semiconductor material and manufacturing method for semiconductor device

Method of manufacturing a thin film transistor

Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film

Laser processing unit, laser processing method, and method for manufacturing semiconductor device

Digital light valve semiconductor processing

Semiconductor device, method of measuring light intensity distribution of laser light, laser annealing apparatus, and crystallization method

Process for producing crystalline thin film

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LTPS FILM

Laser crystallization and selective patterning using multiple beamlets

Method of manufacturing a semiconductor film and method of manufacturing a semiconductor device by transferring crystallization promoting material in the first semiconductor film to the second semiconductor film through a barrier film

Pulse sequencing lateral growth method

Method and apparatus for producing polycrystalline silicon film and method of manufacturing semiconductor device and thin-film transistor

Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same

Method of fabricating planarized poly-silicon thin film transistors

Method for manufacturing a semiconductor device

Process for producing semiconductor device

Method of manufacturing an electro-optical device

Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LOW TEMPERATURE POLY-SILICON LAYER

Method for planarizing polysilicon

Single-shot semiconductor processing system and method having various irradiation patterns

Method and apparatus forming crystallized semiconductor layer, and method for manufacturing semiconductor apparatus

Fabrication method of thin film transistor

Buffer layer for promoting electron mobility and thin film transistor having the same

Thin film transistor and method of fabricating the same

Thin film transistor, method of manufacturing thin film transistor, and display device

Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions

Active matrix display device with active element including a semiconductor film formed of an aggregate of single crystals each extending in the same direction

Active matrix substrate, electro-optical device, electronic device, and method for manufacturing an active matrix substrate

Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus for the semiconductor thin film

Display device, manufacturing method thereof, and television set

Light irradiation apparatus, crystallization apparatus, crystallization method and device

Mask for making polysilicon structure, method of making the same, and method of making thin film transistor using the same

Laser process apparatus, laser irradiation method, and method for manufacturing semiconductor device

Semiconductor thin film crystallization device and semiconductor thin film crystallization method

Method of fabricating semiconductor device and semiconductor fabricated by the same method

Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus

Method for manufacturing polysilicon layer and method for manufacturing thin film transistor thereby

Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same

Polysilicon structure, thin film transistor panel using the same, and manufacturing method of the same

Method of manufacturing semiconductor device having a circuit including thin film transistors

Crystallization method and apparatus thereof

Laser beam projection mask, and laser beam machining method and laser beam machine using same

Method of fabricating a semiconductor thin film and semiconductor thin film fabrication apparatus

Method for manufacturing semiconductor device

Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment

Apparatus for forming a semiconductor thin film

Method of fabricating a semiconductor thin film and semiconductor thin film fabrication apparatus

Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device

Laser thin film poly-silicon annealing optical system

Light irradiator and light irradiating method

Polycrystalline Si thin film structure and fabrication method thereof and method of fabricating TFT using the same

Method for manufacturing semiconductor device

Method for fabricating image display device

Process for fabricating semiconductor device

Semiconductor thin film forming method and semiconductor device

Semiconductor device, electro-optic device, integrated circuit, and electronic apparatus

Laser mask and method of crystallization using the same

Method of improving polysilicon film crystallinity

Crystallization apparatus, crystallization method, device and phase modulation element

Method for manufacturing semiconductor device

Thermal flux processing by scanning a focused line beam

Semiconductor thin film manufacturing method

Semiconductor device, manufacturing method thereof and manufacturing apparatus therefor

Method of manufacturing a semiconductor device

Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions

Method for manufacturing thin film transistor

Crystalline film and its manufacture method using laser

Laser annealing apparatus and method

Manufacturing process of semi-conductor device

Method for crystallizing semiconductor material

Method and apparatus for crystallizing silicon, method of forming a thin film transistor, a thin film transistor and a display apparatus using same

Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device

Amorphous silicon deposition for sequential lateral solidification

Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element

Optic mask and manufacturing method of thin film transistor array panel using the same

Manufacturing method of semiconductor film and image display device

Laser annealing apparatus and annealing method of semiconductor thin film using the same

Isotropic polycrystalline silicon

Method of crystallizing a semiconductor film using laser irradiation

Laser annealing apparatus and annealing method of semiconductor thin film

Semiconductor thin film crystallization method

Low-fluence irradiation for lateral crystallization enabled by a heating source

Polysilicon thin film transistor array panel and manufacturing method thereof

Crystallization mask, crystallization method, and method of manufacturing thin film transistor including crystallized semiconductor

Method and apparatus for forming polycrystalline layer using laser crystallization

Method for forming polycrystalline silicon film

Silicon crystallization apparatus and silicon crystallization method thereof

Surface planarization method of sequential lateral solidification crystallized poly-silicon thin film

Method for forming polycrystalline silicon film

Method of crystallizing/activating polysilicon layer and method of fabricating thin film transistor having the same polysilicon layer

Display device and method for manufacturing the same

Laser mask and crystallization method using the same

Laser mask and method of crystallization using the same

Mask for laser crystallization and crystallization method using the same

Laser beam pattern mask and crystallization method using the same

Sequential lateral solidification device and method of crystallizing silicon using the same

Laser mask and crystallization method using the same

Semiconductor device with modified mobility and thin film transistor having the same

Semiconductor thin film decomposing method, decomposed semiconductor thin film, decomposed semiconductor thin film evaluation method, thin film transistor made of decomposed semiconductor thin film, and image display device having circuit constituted of thin film transistors

Laser mask and crystallization method using the same

Laser irradiation method and method for manufacturing crystalline semiconductor film

Method of deciding focal plane and method of crystallization using thereof

Silicon crystallizing device

Thin film semiconductor device, production process and information displays

Laser crystallization apparatus and laser crystallization method

Thin film semiconductor device having a gate electrode insulator formed through high-heat oxidization

Semiconductor device and method for manufacturing the same

Laser irradiation apparatus, laser irradiation method and method for manufacturing semiconductor device

Method and apparatus for forming a semiconductor substrate with a layer structure of activated dopants

Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device

Semiconductor thin film forming system

Method of fabricating a polysilicon layer

Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device

Laser thermal annealing of lightly doped silicon substrates

Process for long crystal lateral growth in silicon films by UV and IR pulse sequencing

Silicon thin film transistors and solar cells on plastic substrates

Semiconductor device having thin film transistor with position controlled channel formation region

Manufacturing method of a thin-film semiconductor device

Mask for crystallizing and method of crystallizing amorphous silicon using the same

Method of manufacturing a semiconductor device

Semiconductor device, and method of forming the same

Beam homogenizer laser irradiation, apparatus, semiconductor device, and method of fabricating the semiconductor device

Active matrix organic electroluminescence display device and method for manufacturing the same

Method of manufacturing a semiconductor device and a process of a thin film transistor

Thin film transistor with gate electrode portion crossing grain growing direction and liquid crystal display comprising the same

Fabrication method for polycrystalline silicon thin film and apparatus using the same

Fabrication method for polycrystalline silicon thin film and display device fabricated using the same

Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask

Method of controlling polysilicon crystallization

Method of in-situ monitoring of crystallization state

Method of manufacturing a semiconductor method of manufacturing a thin-film transistor and thin-film transistor

Display panel and method for manufacturing the same

Laser thermal annealing of lightly doped silicon substrates

Method of fabricating crystalline silicon and switching device using crystalline silicon

Systems and methods for inducing crystallization of thin films using multiple optical paths

Method of forming polycrystalline semiconductor layer and thin film transistor using the same

Sequential lateral solidification device and method of crystallizing silicon using the same

Process for producing polysilicon film

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device

Method of manufacturing semiconductor device

Silicon crystallization method

Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam

Crystallizing silicon using a laser beam transmitted through a mask

Crystallization apparatus, crystallization method, method of manufacturing thin film transistor, thin film transistor, and display apparatus

Laser irradiation method, method for manufacturing a semiconductor device, and a semiconductor device

Method for manufacturing a semiconductor device where the scanning direction changes between regions during crystallization and process

Isotropic polycrystalline silicon and method for producing same

Laser thin film poly-silicon annealing optical system

Laser annealing apparatus and semiconductor device manufacturing method

Fabrication method of semiconductor device

Method of manufacturing flat panel displays

Semiconductor element, semiconductor device, electronic device, TV set and digital camera

Semiconductor circuit and method of fabricating the same

Method for manufacturing semiconductor device, and laser irradiation apparatus

Semiconductor device and method for manufacturing semiconductor device

Method of fabricating semiconductor device

[METHOD OF FABRICATING POLYSILICON FILM]

Laser annealing method and laser annealing device

Method of fabricating polysilicon film

[METHOD OF FABRICATING POLYSILICON FILM]

Electro-optical device and thin film transistor and method for forming the same

Method and apparatus for forming crystallized semiconductor layer, and method for manufacturing semiconductor apparatus

Flat panel display device comprising polysilicon thin film transistor and method of manufacturing the same

Thin film transistor formed on a transparent substrate

Method for optimized laser annealing smoothing

Laser beam treatment device and semiconductor device

Method for manufacturing an oriented crystalline semiconductor using a pulsed laser

Method of and apparatus for manufacturing semiconductor thin film, and method of manufacturing thin film transistor

Inspection method and apparatus of laser crystallized silicons

Crystallized silicon vertical diode on BEOL for access device for confined PCM arrays

Methods of forming conductors and semiconductors on a substrate