83986 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity Avoid or control over-etching
Sub-classes:Fence structure to prevent stiction in a MEMS motion sensor
#2Method of etching microelectronic mechanical system features in a silicon wafer
#3Method of etching microelectronic mechanical system features in a silicon wafer
#4Fence structure to prevent stiction in a MEMS motion sensor
#5MEMS structure with an etch stop layer buried within inter-dielectric layer