Patents-Review.com
ClassID:

84069 ⎘

B81C2201/0109 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Surface micromachining; Sacrificial layer Sacrificial layers not provided for in  - 

Recent Application in this class:
#1
20260118197
2026-04-30

PRESSURE SENSOR HAVING HIGH DETECTION PERFORMANCE AND OPTIMIZED MANUFACTURING

 #2
20260109595
2026-04-23

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS

 #3
20260103377
2026-04-16

MULTI-CELL PISTON MOTION MEMBRANE MICROELECTROMECHANICAL SYSTEMS (MEMS) APPARATUS AND PROCESS

 #4
20260077998
2026-03-19

Zero Power Micro-Chemomechanical Hydrogen Sensor

 #5
20260015225
2026-01-15

METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES

 #6
20250361137
2025-11-27

MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES

 #7
20250326628
2025-10-23

MEMBRANE CONNECTED TO PILLAR WITH SPRING CHARACTERISTICS

 #8
20250296832
2025-09-25

Electrostatic MEMS Transducer with Vertical Actuator Cells

 #9
20250229292
2025-07-17

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICES

 #10
20250145451
2025-05-08

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCTURE HAVING IMPROVED MECHANICAL ROBUSTNESS

 #11
20250083951
2025-03-13

PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUCED STICTION PHENOMENON

 #12
20250066188
2025-02-27

MEMS GRATING AND FABRICATION METHOD

 #13
20250030987
2025-01-23

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AND METHOD FOR PRODUCING A MICROELECTROMECHANICAL DEVICE

 #14
20240383745
2024-11-21

MICROMECHANICAL COMPONENT

 #15
20240351864
2024-10-24

MULTI-LEVEL MEMS PROCESS

 #16
20240343558
2024-10-17

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

 #17
20240270568
2024-08-15

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING SAME AND PREPARATION METHOD THEREFOR

 #18
20240262678
2024-08-08

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE

 #19
20240253977
2024-08-01

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME

 #20
20240208805
2024-06-27

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS

 #21
20240199415
2024-06-20

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CAVITY PRESSURE CONTROL

 #22
20240171918
2024-05-23

MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME

 #23
20240100566
2024-03-28

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #24
20240067519
2024-02-29

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES

 #25
20240010489
2024-01-11

MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PROCESS OF THE MEMS DEVICE

 #26
20230403514
2023-12-14

MEMS capacitance microphone and manufacturing method thereof

 #27
20230382717
2023-11-30

MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD

 #28
20230345185
2023-10-26

MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF

 #29
20230247372
2023-08-03

METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER

 #30
20230213389
2023-07-06

METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL WALL MADE OF A MINERAL MATERIAL

 #31
20230149976
2023-05-18

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #32
20230107094
2023-04-06

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE

 #33
20230061430
2023-03-02

METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIVE PRESSURE SENSOR AND AN INERTIAL SENSOR, AND INTEGRATED SYSTEM

 #34
20220396477
2022-12-15

Micromechanical component for a sensor device or microphone device

 #35
20220396476
2022-12-15

Engineered substrates, free-standing semiconductor microstructures, and related systems and methods

 #36
20220324699
2022-10-13

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

 #37
20220185656
2022-06-16

Manufacturing method of semiconductor structure

 #38
20220172506
2022-06-02

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

 #39
20220055893
2022-02-24

Precision fabrication of nanosieves

 #40
20220023915
2022-01-27

Piezoelectric micromachined ultrasonic transducer and method of fabricating the same

 #41
20210362189
2021-11-25

Piezoelectric micromachined ultrasonic transducer and method of fabricating the same

 #42
20210356342
2021-11-18

Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm

 #43
20210347636
2021-11-11

PROCESS FOR MANUFACTURING A DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION, COMPRISING A SUSPENDED DETECTION ELEMENT

 #44
20210300753
2021-09-30

Device having a membrane and method of manufacture

 #45
20210292161
2021-09-23

Methods for forming a MEMS device layer on an active device layer and devices formed thereby

 #46
20210225637
2021-07-22

Freezing a sacrificial material in forming a semiconductor

 #47
20210210341
2021-07-08

Sublimation in forming a semiconductor

 #48
20210144485
2021-05-13

Structure of micro-electro-mechanical-system microphone

 #49
20210029470
2021-01-28

Dielectric comb for MEMS device

 #50
20210021937
2021-01-21

Integrated structure of mems microphone and air pressure sensor and fabrication method thereof

 #51
20200389721
2020-12-10

MEMS microphone with acoustic relief channels

 #52
20200361763
2020-11-19

Manufacturing method of semiconductor structure

 #53
20200354848
2020-11-12

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

 #54
20200262698
2020-08-20

Precision fabrication of nanosieves

 #55
20200250393
2020-08-06

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

 #56
20200239303
2020-07-30

Microelectromechanical component and method for producing same

 #57
20200231429
2020-07-23

Method for manufacturing MEMS microphone

 #58
20200216309
2020-07-09

MEMS component and production method for a MEMS component

 #59
20200207609
2020-07-02

MEMS via with enhanced electrical and mechanical integrity

 #60
20200165123
2020-05-28

MEMs membrane structure and method of fabricating same

 #61
20200156110
2020-05-21

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #62
20200095120
2020-03-26

Method of manufacturing semiconductor device

 #63
20200070151
2020-03-05

Method to create multilayer microfluidic chips using spin-on carbon as gap fill and spin-on glass tone inversion

 #64
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #65
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #66
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #67
20200014994
2020-01-09

MEMS microphone and method of manufacturing the same

 #68
20190362899
2019-11-28

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #69
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #70
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #71
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #72
20190230447
2019-07-25

High sensitivity microphone and manufacturing method thereof

 #73
20190189427
2019-06-20

Freezing a sacrificial material in forming a semiconductor

 #74
20190189426
2019-06-20

Removing a sacrificial material via sublimation in forming a semiconductor

 #75
20190169020
2019-06-06

PACKAGE SUBSTRATE INTEGRATED DEVICES

 #76
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #77
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #78
20190092632
2019-03-28

Micro-device having a metal-semiconductor compound layer protected against HF etching and method for making the same

 #79
20190082271
2019-03-14

MEMS microphone and method of manufacturing the same

 #80
20190082270
2019-03-14

MEMS microphone and method of manufacturing the same

 #81
20190082269
2019-03-14

MEMS microphone and method of manufacturing the same

 #82
20190052976
2019-02-14

MEMS microphone and method of manufacturing the same

 #83
20190023562
2019-01-24

MEMS component and production method for a MEMS component

 #84
20190017189
2019-01-17

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

 #85
20180346320
2018-12-06

MEMS acoustic pressure sensor device and method for making same

 #86
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #87
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #88
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #89
20180215609
2018-08-02

Integrated particle filter for MEMS device

 #90
20180208455
2018-07-26

MEMS microphone and method for manufacturing the same

 #91
20180170745
2018-06-21

Semiconductor device, microphone and method for producing a semiconductor device

 #92
20180152791
2018-05-31

MEMS microphone having reduced leakage current and method of manufacturing the same

 #93
20180148328
2018-05-31

Process for producing an electromechanical device

 #94
20180134548
2018-05-17

MEMS double-layer suspension microstructure manufacturing method, and MEMS infrared detector

 #95
20180107854
2018-04-19

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

 #96
20180086627
2018-03-29

Integrating MEMS structures with interconnects and vias

 #97
20180077499
2018-03-15

HIGH SENSITIVITY MICROPHONE AND MANUFACTURING METHOD THEREOF

 #98
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #99
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #100
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #101
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #102
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #103
20180016132
2018-01-18

Layer structure and method of manufacturing a layer structure

 #104
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #105
20170341929
2017-11-30

Semiconductor device and method of manufacturing the same

 #106
20170339494
2017-11-23

MEMS acoustic transducer with combfingered electrodes and corresponding manufacturing process

 #107
20170311089
2017-10-26

MEMS microphone and method of manufacturing the same

 #108
20170311088
2017-10-26

MEMS microphone and method of manufacturing the same

 #109
20170247807
2017-08-31

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

 #110
20170225944
2017-08-10

MEMS acoustic pressure sensor device and method for making same

 #111
20170225942
2017-08-10

Active opening MEMS switch device

 #112
20170174508
2017-06-22

Method for manufacturing MEMS torsional electrostatic actuator

 #113
20170158494
2017-06-08

MEMS device structure with a capping structure

 #114
20170154734
2017-06-01

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #115
20170144883
2017-05-25

MICROELECTRONIC PACKAGE AND METHOD OF MANUFACTURING A MICROELECTRONIC PACKAGE

 #116
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #117
20170113925
2017-04-27

Method of encapsulating a microelectronic component

 #118
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #119
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #120
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #121
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #122
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #123
20160304336
2016-10-20

Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element

 #124
20160277845
2016-09-22

MEMS-BASED SPEAKER IMPLEMENTATION

 #125
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #126
20160240320
2016-08-18

Curved RF electrode for improved Cmax

 #127
20160229691
2016-08-11

Method for manufacturing thin-film support beam

 #128
20160228915
2016-08-11

CMUT device manufacturing method, CMUT device and apparatus

 #129
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #130
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #131
20160088414
2016-03-24

Method of manufacturing a MEMS microphone

 #132
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #133
20160078887
2016-03-17

Main pole layer with at least two sacrificial layers and a gap layer

 #134
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #135
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #136
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #137
20160008849
2016-01-14

Ultrasonic transducer, method of producing same, and ultrasonic probe using same

 #138
20150368099
2015-12-24

Etch release residue removal using anhydrous solution

 #139
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #140
20140211366
2014-07-31

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #141
20140209473
2014-07-31

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

 #142
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #143
20140037116
2014-02-06

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

 #144
20140017901
2014-01-16

Vapour etch of silicon dioxide with improved selectivity

 #145
20130309797
2013-11-21

Method for manufacturing MEMS device

 #146
20130305519
2013-11-21

Method of manufacturing a probe comprising a cantilever with a conduit

 #147
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #148
20130221454
2013-08-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #149
20130020718
2013-01-24

MEMS devices and methods of forming same

 #150
20120171798
2012-07-05

Damascene process for use in fabricating semiconductor structures having micro/nano gaps

 #151
20120161257
2012-06-28

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

 #152
20120115311
2012-05-10

Method for forming a multilayer structure

 #153
20120115269
2012-05-10

Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes

 #154
20120062570
2012-03-15

PROCESS OF FORMING AN AIR GAP IN A MICROELECTROMECHANICAL SYSTEM DEVICE USING A LINER MATERIAL

 #155
20120057216
2012-03-08

MULTICOMPONENT SACRIFICIAL STRUCTURE

 #156
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #157
20110316383
2011-12-29

ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASONIC PROBE USING SAME

 #158
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #159
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #160
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #161
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #162
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #163
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #164
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #165
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #166
20110205615
2011-08-25

MEMS devices with multi-component sacrificial layers

 #167
20110051224
2011-03-03

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

 #168
20110031567
2011-02-10

Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby

 #169
20110002359
2011-01-06

Sensor and method for its production

 #170
20100320555
2010-12-23

Controlling electromechanical behavior of structures within a microelectromechanical systems device

 #171
20100320548
2010-12-23

Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication

 #172
20100317137
2010-12-16

Method for releasing the suspended structure of a NEMS and/or NEMS component

 #173
20100297781
2010-11-25

METHOD FOR MANUFACTURING MEMS STRUCTURES

 #174
20100270165
2010-10-28

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

 #175
20100240215
2010-09-23

Multi-sacrificial layer and method

 #176
20100227437
2010-09-09

Semiconductor devices grown in spherical cavity arrays and its preparation method

 #177
20100213068
2010-08-26

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

 #178
20100193781
2010-08-05

Micromechanical structure and a method of fabricating a micromechanical structure

 #179
20100165442
2010-07-01

MEMS devices with multi-component sacrificial layers

 #180
20100155864
2010-06-24

MEMS process and device

 #181
20100109100
2010-05-06

Micro-fluidic structure

 #182
20100044808
2010-02-25

METHOD OF MANUFACTURING A MEMS ELEMENT

 #183
20090325335
2009-12-31

Heterogeneous substrate including a sacrificial layer, and a method of fabricating it

 #184
20090317930
2009-12-24

Method for producing a structure comprising a mobile element by means of a heterogeneous sacrificial layer

 #185
20090305010
2009-12-10

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

 #186
20090278217
2009-11-12

MEMS device

 #187
20090250430
2009-10-08

Methods for fabrication of three-dimensional structures

 #188
20090206422
2009-08-20

Micromechanical diaphragm sensor having a double diaphragm

 #189
20090134522
2009-05-28

Micro-Electromechanical System Memory Device and Method of Making the Same

 #190
20090059345
2009-03-05

MEMS DEVICES WITH PROTECTIVE COATINGS

 #191
20090045473
2009-02-19

Devices having horizontally-disposed nanofabric articles and methods of making the same

 #192
20080121343
2008-05-29

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

 #193
20080029481
2008-02-07

Methods for reducing surface charges during the manufacture of microelectromechanical systems devices

 #194
20080026328
2008-01-31

Method for fabricating a structure for a microelectromechanical systems (MEMS) device

 #195
20070284682
2007-12-13

MEMS process and device

 #196
20070279753
2007-12-06

Patterning of mechanical layer in MEMS to reduce stresses at supports

 #197
20070273728
2007-11-29

Method of making a micro-fluidic structure

 #198
20070235826
2007-10-11

Devices having horizontally-disposed nanofabric articles and methods of making the same

 #199
20070224720
2007-09-27

Manufacturing method of suspended microstructure

 #200
20070206267
2007-09-06

Methods for producing MEMS with protective coatings using multi-component sacrificial layers

 #201
20070199822
2007-08-30

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

 #202
20070158775
2007-07-12

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

 #203
20070138582
2007-06-21

Multiple stage MEMS release for isolation of similar materials

 #204
20070128831
2007-06-07

Process for fabricating a micro-electro-mechanical system with movable components

 #205
20070090474
2007-04-26

MEMS device and method of fabrication

 #206
20070065963
2007-03-22

Method of manufacturing a micro-mechanical element

 #207
20070037311
2007-02-15

Manufacturing method of microelectromechanical system

 #208
20070018260
2007-01-25

Devices having vertically-disposed nanofabric articles and methods of making the same

 #209
20070012891
2007-01-18

Prototyping methods and devices for microfluidic components

 #210
20060291129
2006-12-28

Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator

 #211
20060234476
2006-10-19

Electronic component and method for its production

 #212
20060226114
2006-10-12

Method for producing a micromechanical device and a micromechanical device

 #213
20060204699
2006-09-14

Parylene coated microfluidic components and methods for fabrication thereof

 #214
20060183309
2006-08-17

Method for manufacturing a patterned structure

 #215
20060134819
2006-06-22

Process for forming MEMS

 #216
20060128049
2006-06-15

Devices having vertically-disposed nanofabric articles and methods of making the same

 #217
20060115919
2006-06-01

Method of making a microelectromechanical (MEM) device using porous material as a sacrificial layer

 #218
20060096377
2006-05-11

Microelectromechanical (MEM) device including a spring release bridge and method of making the same

 #219
20060077502
2006-04-13

Methods of fabricating interferometric modulators by selectively removing a material

 #220
20060076311
2006-04-13

Methods of fabricating interferometric modulators by selectively removing a material

 #221
20060054972
2006-03-16

Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture

 #222
20060037932
2006-02-23

Method and micromechanical component

 #223
20060035439
2006-02-16

Method of foming a micromechanical structure

 #224
20060027891
2006-02-09

Sacrificial layer technique to make gaps in MEMS applications

 #225
20050250236
2005-11-10

Damascene process for use in fabricating semiconductor structures having micro/nano gaps

 #226
20050250235
2005-11-10

Controlling electromechanical behavior of structures within a microelectromechanical systems device

 #227
20050239231
2005-10-27

Method for making a microelectromechanical system using a flexure protection layer

 #228
20050230257
2005-10-20

Microdevice with movable microplatform and process for making thereof

 #229
20050227477
2005-10-13

Semiconductor device manufacturing method

 #230
20050227428
2005-10-13

Process for manufacturing mems

 #231
20050221528
2005-10-06

Microelectronic mechanical system and methods

 #232
20050204821
2005-09-22

Micromechanical component having a diaphragm

 #233
20050200985
2005-09-15

Micro-support structures

 #234
20050190023
2005-09-01

Micro-switching element fabrication method and micro-switching element

 #235
20050142688
2005-06-30

Episeal pressure sensor

 #236
20050142684
2005-06-30

Method for fabricating a structure for a microelectromechanical system (MEMS) device

 #237
20050110110
2005-05-26

Integrated released beam layer structure fabricated in trenches and manufacturing method thereof

 #238
20050085000
2005-04-21

Manufacturing methods of MEMS device

 #239
20050072681
2005-04-07

Multi-step release method for electrochemically fabricated structures

 #240
20050070119
2005-03-31

Method to make a weight compensating/tuning layer on a substrate

 #241
20050059254
2005-03-17

Methods and apparatus of etch process control in fabrications of microstructures

 #242
20050057792
2005-03-17

Method of forming a micromechanical structure

 #243
20050045276
2005-03-03

Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants

 #244
20050017276
2005-01-27

Electronic device with thin film structure

 #245
20050001276
2005-01-06

Selective etching of silicon carbide films

 #246
20050000932
2005-01-06

Multi-metal layer MEMS structure and process for making the same

 #247
15624928
2020-02-25

Fabrication of multilayered carbon MEMS devices