206659 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Lithography by projection from patterned cold cathode Field-emitting cathode
Integrated circuits having interconnects and heat dissipators based on nanostructures
#2Integrated circuits having interconnects and heat dissipators based on nanostructures
#3Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
#4Controlled growth of a nanostructure on a substrate
#5Digital parallel electron beam lithography stamp
#6Integrated circuits having interconnects and heat dissipators based on nanostructures
#7Electron beam duplication lithography method
#8Electron beam duplication lithography method and apparatus