Netherlands
88
2015-07-09
88
2016-06-14
These are the the leading inventors for applications assigned to ASM International N.V.:
ASM International N.V. based in , NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Precursors and methods for atomic layer deposition of transition metal oxides
#2 | 2015-07-02 ✅ Patent 9,257,303 granted on 2016-02-09Selective formation of metallic films on metallic surfaces
#3 | 2015-05-28 ✅ Patent 9,368,352 granted on 2016-06-14Methods for forming doped silicon oxide thin films
#4 | 2015-01-15 ✅ Patent 9,153,441 granted on 2015-10-06Methods for forming doped silicon oxide thin films
#5 | 2013-08-01 ✅ Patent 9,112,003 granted on 2015-08-18Selective formation of metallic films on metallic surfaces
#6 | 2013-07-25 ✅ Patent 8,956,971 granted on 2015-02-17Selective formation of metallic films on metallic surfaces
#7 | 2013-07-18 ✅ Patent 9,127,351 granted on 2015-09-08Enhanced thin film deposition
#8 | 2013-05-09 ✅ Patent 9,379,011 granted on 2016-06-28Methods for depositing nickel films and for making nickel silicide and nickel germanide
#9 | 2013-05-09 ✅ Patent 8,679,958 granted on 2014-03-25Methods for forming doped silicon oxide thin films
#10 | 2013-05-02 ✅ Patent 9,062,390 granted on 2015-06-23Crystalline strontium titanate and methods of forming the same
#11 | 2013-04-18 ✅ Patent 9,006,112 granted on 2015-04-14Atomic layer deposition of antimony oxide films
#12 | 2012-11-15 ✅ Patent 9,447,496 granted on 2016-09-20Nanolayer deposition process
#13 | 2012-10-11 ✅ Patent 8,940,374 granted on 2015-01-27Nanolayer deposition process
#14 | 2012-07-26 ✅ Patent 8,501,275 granted on 2013-08-06Enhanced deposition of noble metals
#15 | 2012-02-02 ✅ Patent 8,536,058 granted on 2013-09-17Method of growing electrical conductors
#16 | 2012-01-26 ✅ Patent 9,121,098 granted on 2015-09-01NanoLayer Deposition process for composite films
#17 | 2012-01-12 ✅ Patent 8,927,403 granted on 2015-01-06Selective deposition of noble metal thin films
#18 | 2011-11-03 ✅ Patent 8,293,597 granted on 2012-10-23Selective silicide process
#19 | 2011-10-20 ✅ Patent 8,252,703 granted on 2012-08-28Methods for forming roughened surfaces and applications thereof
#20 | 2011-08-25 ✅ Patent 8,592,294 granted on 2013-11-26High temperature atomic layer deposition of dielectric oxides
#21 | 2011-03-31 ✅ Patent 8,309,173 granted on 2012-11-13System for controlling the sublimation of reactants
#22 | 2010-12-30 ✅ Patent 8,118,941 granted on 2012-02-21Semiconductor processing parts having apertures with deposited coatings and methods for forming the same
#23 | 2010-11-11 ✅ Patent 9,708,707 granted on 2017-07-18Nanolayer deposition using bias power treatment
#24 | 2010-10-21 ✅ Patent 7,998,883 granted on 2011-08-16Process for producing zirconium oxide thin films
#25 | 2010-08-26 ✅ Patent 7,829,457 granted on 2010-11-09Protection of conductors from oxidation in deposition chambers
#26 | 2010-08-19 ✅ Patent 9,127,340 granted on 2015-09-08Selective oxidation process
#27 | 2010-08-12 ✅ Patent 7,884,016 granted on 2011-02-08Liner materials and related processes for 3-D integration
#28 | 2010-07-29 ✅ Patent 8,658,259 granted on 2014-02-25Nanolayer deposition process
#29 | 2010-06-24 ✅ Patent 7,927,942 granted on 2011-04-19Selective silicide process
#30 | 2010-06-17 ✅ Patent 7,833,906 granted on 2010-11-16Titanium silicon nitride deposition
#31 | 2010-06-03 ✅ Patent 7,985,669 granted on 2011-07-26Selective deposition of noble metal thin films
#32 | 2010-06-03 ✅ Patent 8,012,876 granted on 2011-09-06Delivery of vapor precursor from solid source
#33 | 2010-01-14 ✅ Patent 8,343,583 granted on 2013-01-01Method for vaporizing non-gaseous precursor in a fluidized bed
#34 | 2010-01-14 ✅ Patent 9,175,390 granted on 2015-11-03Synthesis and use of precursors for ALD of tellurium and selenium thin films
#35 | 2009-12-31 ✅ Patent 8,372,483 granted on 2013-02-12Methods for forming thin films comprising tellurium
#36 | 2009-12-03 ✅ Patent 8,945,675 granted on 2015-02-03Methods for forming conductive titanium oxide thin films
#37 | 2009-10-01 ✅ Patent 8,545,936 granted on 2013-10-01Methods for forming carbon nanotubes
#38 | 2009-08-20 ✅ Patent 8,501,637 granted on 2013-08-06Silicon dioxide thin films by ALD
#39 | 2009-03-19 ✅ Patent 7,807,222 granted on 2010-10-05Semiconductor processing parts having apertures with deposited coatings and methods for forming the same
#40 | 2009-03-12 ✅ Patent 8,180,594 granted on 2012-05-15System and method for automated customizable error diagnostics
#41 | 2009-03-12 ✅ Patent 7,981,791 granted on 2011-07-19Thin films
#42 | 2009-01-22 ✅ Patent 8,034,410 granted on 2011-10-11Protective inserts to line holes in parts for semiconductor process equipment
#43 | 2008-12-25 ✅ Patent 8,017,182 granted on 2011-09-13Method for depositing thin films by mixed pulsed CVD and ALD
#44 | 2008-11-20 ✅ Patent 7,629,256 granted on 2009-12-08In situ silicon and titanium nitride deposition
#45 | 2008-11-13 ✅ Patent 8,323,737 granted on 2012-12-04Sequential chemical vapor deposition
#46 | 2008-06-19 ✅ Patent 7,955,979 granted on 2011-06-07Method of growing electrical conductors
#47 | 2008-03-27 ✅ Patent 7,740,437 granted on 2010-06-22Processing system with increased cassette storage capacity
#48 | 2008-03-27 ✅ Patent 8,685,165 granted on 2014-04-01Metal oxide films
#49 | 2008-01-29 ✅ Patent 7,323,422 granted on 2008-01-29Dielectric layers and methods of forming the same
#50 | 2008-01-17 ✅ Patent 7,754,621 granted on 2010-07-13Process for producing zirconium oxide thin films
#51 | 2008-01-10 ✅ Patent 7,749,918 granted on 2010-07-06Method and apparatus for processing semiconductor substrates
#52 | 2008-01-03 ✅ Patent 7,691,757 granted on 2010-04-06Deposition of complex nitride films
#53 | 2007-11-01 ✅ Patent 7,491,634 granted on 2009-02-17Methods for forming roughened surfaces and applications thereof
#54 | 2007-08-30 ✅ Patent 7,651,569 granted on 2010-01-26Pedestal for furnace
#55 | 2007-07-26 ✅ Patent 7,497,420 granted on 2009-03-03Safe liquid source containers
#56 | 2007-06-28 ✅ Patent 8,993,055 granted on 2015-03-31Enhanced thin film deposition
#57 | 2007-06-21 ✅ Patent 7,553,516 granted on 2009-06-30System and method of reducing particle contamination of semiconductor substrates
#58 | 2007-06-21 ✅ Patent 7,718,518 granted on 2010-05-18Low temperature doped silicon layer formation
#59 | 2007-05-31 ✅ Patent 7,570,876 granted on 2009-08-04Method and system for loading substrate supports into a substrate holder
#60 | 2007-05-03 ✅ Patent 7,670,944 granted on 2010-03-02Conformal lining layers for damascene metallization
#61 | 2007-04-05 ✅ Patent 7,732,350 granted on 2010-06-08Chemical vapor deposition of TiN films in a batch reactor
#62 | 2007-03-15 ✅ Patent 7,691,750 granted on 2010-04-06Methods of forming films in semiconductor devices with solid state reactants
#63 | 2007-01-18 ✅ Patent 7,754,013 granted on 2010-07-13Apparatus and method for atomic layer deposition on substrates
#64 | 2006-12-28 ✅ Patent 7,704,896 granted on 2010-04-27Atomic layer deposition of thin films on germanium
#65 | 2006-11-02 ✅ Patent 7,351,057 granted on 2008-04-01Door plate for furnace
#66 | 2006-09-07 ✅ Patent 7,629,267 granted on 2009-12-08High stress nitride film and method for formation thereof
#67 | 2006-08-01 ✅ Patent 7,085,623 granted on 2006-08-01Method and system for using short ranged wireless enabled computers as a service tool
#68 | 2006-06-29 ✅ Patent 7,410,355 granted on 2008-08-12Method for the heat treatment of substrates
#69 | 2006-06-22 ✅ Patent 7,202,491 granted on 2007-04-10Method for sensing wafers located inside a closed wafer cassette
#70 | 2006-05-25 ✅ Patent 7,217,670 granted on 2007-05-15Dummy substrate for thermal reactor
#71 | 2006-04-27 ✅ Patent 7,294,582 granted on 2007-11-13Low temperature silicon compound deposition
#72 | 2006-04-20 ✅ Patent 7,674,726 granted on 2010-03-09Parts for deposition reactors
#73 | 2006-04-13 ✅ Patent 7,410,666 granted on 2008-08-12Metal nitride carbide deposition by ALD
#74 | 2006-03-23 ✅ Patent 7,966,969 granted on 2011-06-28Deposition of TiN films in a batch reactor
#75 | 2006-02-02 ✅ Patent 7,601,225 granted on 2009-10-13System for controlling the sublimation of reactants
#76 | 2005-12-22 ✅ Patent 7,253,107 granted on 2007-08-07Pressure control system
#77 | 2005-10-18 ✅ Patent 6,955,986 granted on 2005-10-18Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits
#78 | 2005-08-23 ✅ Patent 6,932,867 granted on 2005-08-23Method for growing thin oxide films
#79 | 2005-08-18 ✅ Patent 7,419,903 granted on 2008-09-02Thin films
#80 | 2005-08-04 ✅ Patent 7,128,570 granted on 2006-10-31Method and apparatus for purging seals in a thermal reactor
#81 | 2005-05-12 ✅ Patent 7,732,331 granted on 2010-06-08Copper interconnect structure having stuffed diffusion barrier
#82 | 2005-04-28 ✅ Patent 7,618,681 granted on 2009-11-17Process for producing bismuth-containing oxide films
#83 | 2005-03-31 ✅ Patent 7,156,380 granted on 2007-01-02Safe liquid source containers
#84 | 2005-03-24 ✅ Patent 7,181,132 granted on 2007-02-20Method and system for loading substrate supports into a substrate holder
#85 | 2005-03-17 ✅ Patent 7,037,372 granted on 2006-05-02Method of growing a thin film onto a substrate
#86 | 2005-03-10 ✅ Patent 7,351,293 granted on 2008-04-01Method and device for rotating a wafer
#87 | 2005-02-17 ✅ Patent 7,312,156 granted on 2007-12-25Method and apparatus for supporting a semiconductor wafer during processing
#88 | 2005-01-27 ✅ Patent 7,153,772 granted on 2006-12-26Methods of forming silicide films in semiconductor devices
363936 ⎘