Rehovot
Israel
74
2026-04-30
50
2025-11-11
These are the the leading inventors for applications assigned to NOVA LTD.:
NOVA LTD. based in Rehovot, IL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
HIGH THROUGHPUT OPTICAL MEASUREMENT SYSTEM
#2 | 2026-04-23TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES
#3 | 2026-03-19SYSTEMS AND METHODS FOR OPTICAL METROLOGY
#4 | 2026-03-12SYSTEM AND METHOD FOR LIBRARY CONSTRUCTION AND USE IN MEASUREMENTS ON PATTERNED STRUCTURES
#5 | 2026-01-08OPTICAL METROLOGY SYSTEM AND METHOD
#6 | 2026-01-08COHERENT SPECTROSCOPY FOR TSV
#7 | 2026-01-01EVALUATION OF ABNORMALITIES OF A SAMPLE
#8 | 2025-12-25SYSTEMS AND METHODS FOR OPTICAL MEASURING OF PROPERTIES OF SAMPLES USING POLARIZED OPTICAL BEAMS
#9 | 2025-12-25OPTICAL CRITICAL DIMENSIONS (OCD) METROLOGY FOR THICK STACKS
#10 | 2025-10-30MACHINE AND DEEP LEARNING METHODS FOR SPECTRA-BASED METROLOGY AND PROCESS CONTROL
#11 | 2025-06-26COMBINED PHOTOTHERMAL AND OCD FOR SEMI-OPAQUE STRUCTURES
#12 | 2025-06-19HIGH FREQUENCY MODULATION CHOPPER
#13 | 2025-04-24ACCURATE RAMAN SPECTROSCOPY
#14 | 2025-04-17FULL-WAFER METROLOGY UP-SAMPLING
#15 | 2025-04-17RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES
#16 | 2025-04-10ACCURATE RAMAN SPECTROSCOPY
#17 | 2025-02-27SYSTEM AND METHOD FOR DETERMINING PARAMETERS OF PATTERNED STRUCTURES FROM OPTICAL DATA
#18 | 2025-02-13METHOD AND SYSTEM FOR OPTIMIZING OPTICAL INSPECTION OF PATTERNED STRUCTURES
#19 | 2024-10-31 ✅ Patent 12,467,879 granted on 2025-11-11OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM
#20 | 2024-10-10METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES
#21 | 2024-09-19 ✅ Patent 12,321,102 granted on 2025-06-03Machine and deep learning methods for spectra-based metrology and process control
#22 | 2024-09-12 ✅ Patent 12,467,869 granted on 2025-11-11RAMAN SPECTROSCOPY BASED MEASUREMENT SYSTEM
#23 | 2024-09-05 ✅ Patent 12,298,182 granted on 2025-05-13Optical technique for material characterization
#24 | 2024-08-15METROLOGY TECHNIQUE FOR SEMICONDUCTOR DEVICES
#25 | 2024-08-08 ✅ Patent 12,360,462 granted on 2025-07-15OPTICAL METROLOGY SYSTEM AND METHOD
#26 | 2024-06-27 ✅ Patent 12,372,473 granted on 2025-07-29ACCURATE RAMAN SPECTROSCOPY
#27 | 2024-03-14TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES
#28 | 2024-03-14 ✅ Patent 12,163,892 granted on 2024-12-10Accurate Raman spectroscopy
#29 | 2024-03-07 ✅ Patent 12,236,364 granted on 2025-02-25Metrology and process control for semiconductor manufacturing
#30 | 2024-02-29EVALUATING X-RAY SIGNALS FROM A PERTURBED OBJECT
#31 | 2024-02-08 ✅ Patent 12,196,691 granted on 2025-01-14X-ray based measurements in patterned structure
#32 | 2024-01-18 ✅ Patent 12,152,993 granted on 2024-11-26Accurate Raman spectroscopy
#33 | 2023-12-14METHOD AND SYSTEM FOR OPTIMIZING OPTICAL INSPECTION OF PATTERNED STRUCTURES
#34 | 2023-09-21 ✅ Patent 12,359,968 granted on 2025-07-15SYSTEMS AND METHODS FOR OPTICAL METROLOGY
#35 | 2023-09-21 ✅ Patent 11,927,481 granted on 2024-03-12Optical technique for material characterization
#36 | 2023-09-07 ✅ Patent 12,498,332 granted on 2025-12-16Imaging metrology
#37 | 2023-06-15 ✅ Patent 11,874,606 granted on 2024-01-16System and method for controlling measurements of sample's parameters
#38 | 2023-06-01 ✅ Patent 11,860,104 granted on 2024-01-02Accurate raman spectroscopy
#39 | 2023-04-27 ✅ Patent 12,165,023 granted on 2024-12-10Measuring local CD uniformity using scatterometry and machine learning
#40 | 2023-04-27 ✅ Patent 11,946,875 granted on 2024-04-02Optical phase measurement system and method
#41 | 2023-04-20 ✅ Patent 11,815,819 granted on 2023-11-14Machine and deep learning methods for spectra-based metrology and process control
#42 | 2023-04-20 ✅ Patent 11,868,054 granted on 2024-01-09Optical metrology system and method
#43 | 2023-03-02INTEGRATED METROLOGY SYSTEM
#44 | 2023-02-09 ✅ Patent 11,740,183 granted on 2023-08-29Accurate Raman spectroscopy
#45 | 2023-02-02 ✅ Patent 12,392,733 granted on 2025-08-19COMBINED OCD AND PHOTOREFLECTANCE METHOD AND SYSTEM
#46 | 2023-01-26 ✅ Patent 12,547,082 granted on 2026-02-10COMBINING PHYSICAL MODELING AND MACINE LEARNING
#47 | 2023-01-19 ✅ Patent 12,038,271 granted on 2024-07-16Detecting outliers and anomalies for OCD metrology machine learning
#48 | 2023-01-19 ✅ Patent 11,747,740 granted on 2023-09-05Self-supervised representation learning for interpretation of OCD data
#49 | 2023-01-05 ✅ Patent 11,802,829 granted on 2023-10-31Method and system for broadband photoreflectance spectroscopy
#50 | 2022-11-24 ✅ Patent 11,906,434 granted on 2024-02-20Raman spectroscopy based measurement system
#51 | 2022-10-13 ✅ Patent 12,066,385 granted on 2024-08-20Raman spectroscopy based measurements in patterned structures
#52 | 2022-06-30 ✅ Patent 12,057,355 granted on 2024-08-06Semiconductor device manufacture with in-line hotspot detection
#53 | 2022-05-26 ✅ Patent 12,152,869 granted on 2024-11-26Monitoring system and method for verifying measurements in patterned structures
#54 | 2022-03-31 ✅ Patent 11,639,901 granted on 2023-05-02Test structure design for metrology measurements in patterned samples
#55 | 2022-03-10 ✅ Patent 11,906,451 granted on 2024-02-20Method and system for non-destructive metrology of thin layers
#56 | 2022-02-10 ✅ Patent 11,929,291 granted on 2024-03-12Layer detection for high aspect ratio etch control
#57 | 2022-02-10 ✅ Patent 11,692,953 granted on 2023-07-04X-ray based measurements in patterned structure
#58 | 2022-02-03 ✅ Patent 11,763,181 granted on 2023-09-19Metrology and process control for semiconductor manufacturing
#59 | 2021-12-23 ✅ Patent 11,994,374 granted on 2024-05-28Integrated measurement system
#60 | 2021-09-23 ✅ Patent 11,900,028 granted on 2024-02-13Scatterometry system and method
#61 | 2021-09-23 ✅ Patent 11,543,294 granted on 2023-01-03Optical technique for material characterization
#62 | 2021-08-12 ✅ Patent 11,366,398 granted on 2022-06-21Time-domain optical metrology and inspection of semiconductor devices
#63 | 2021-07-22 ✅ Patent 11,415,519 granted on 2022-08-16Accurate Raman spectroscopy
#64 | 2021-07-15 ✅ Patent 11,309,162 granted on 2022-04-19TEM-based metrology method and system
#65 | 2021-06-03 ✅ Patent 11,293,871 granted on 2022-04-05Raman spectroscopy based measurement system
#66 | 2021-04-22 ✅ Patent 11,885,737 granted on 2024-01-30Method and system for optical characterization of patterned samples
#67 | 2021-01-07 ✅ Patent 11,150,190 granted on 2021-10-19Hybrid metrology method and system
#68 | 2020-12-31 ✅ Patent 11,300,948 granted on 2022-04-12Process control of semiconductor fabrication based on spectra quality metrics
#69 | 2020-11-12 ✅ Patent 11,460,415 granted on 2022-10-04Optical phase measurement system and method
#70 | 2020-09-17 ✅ Patent 11,450,541 granted on 2022-09-20Metrology method and system
#71 | 2020-08-13 ✅ Patent 11,275,027 granted on 2022-03-15Raman spectroscopy based measurements in patterned structures
#72 | 2020-06-18 ✅ Patent 11,107,738 granted on 2021-08-31Layer detection for high aspect ratio etch control
#73 | 2020-01-02 ✅ Patent 11,335,612 granted on 2022-05-17Apparatus and method for electrical test prediction
#74 | 2019-11-07 ✅ Patent 11,512,943 granted on 2022-11-29Optical system and method for measuring parameters of patterned structures in micro-electronic devices
Also check out NOVA LTD's (Rehovot, Israel) applicant profile with 81 patent applications submitted.
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